Abstract:P-type ZnO films with c-axis orientation deposited by DC reactive magnetron sputtering are first reported in this paper. ZnO films were prepared in NH3–O2 atmosphere (ammonia concentration varied from 0% to 67%) with the substrate temperature in the range of 400–550°C. The properties were examined by X-ray diffraction, atomic force microscopy, Hall measurement, spreading resistance processing and optical transmission spectra. Results showed that excess zinc and interstitial hydrogen play important roles in the doping process. The N-doped ZnO film deposited on α-Al2O3 (0001) at a substrate temperature of 500°C and an ammonia concentration of 50% showed p-type conduction with good electrical properties. A carrier density of 3.2×1017cm−3 and resistivity of 35Ωcm were observed. The p-type ZnO films possess a transmittance of about 90% in the visible region and a band gap of 3.21eV at room temperature. In addition, ZnO p–n homojunctions on p-Si(100) substrate (p-ZnO:N/n-ZnO/p-Si) have also been first achieved, which could further open the door for practical applications in diverse optical devices.

Multi-Carrier Transport Properties in P-Type Zno Thin Films

Roles of Hydrogen and Nitrogen in P-Type Doping of ZnO

Hydrogen‐assisted Nitrogen‐acceptor Doping in ZnO

Hole Transport Properties of P-Type Polycrystalline ZnO Film Using a Dual-Acceptor Doping Method with Lithium and Nitrogen

P-Type Behavior in In–N Codoped ZnO Thin Films

P-Type Behavior of Nitrogen Doped, Lithium Doped, and Nitrogen-Lithium Codoped Zn0.11mg0.89o Thin Films

p-Type conduction in Al–N co-doped ZnO films

P -Type Conduction in N–Al Co-Doped ZnO Thin Films

Control and Improvement of P-Type Conductivity in Indium and Nitrogen Codoped Zno Thin Films

Formation of p-type ZnMgO thin films by In–N codoping method

Homobuffer Thickness Effect on the Conduction Type of Non-Polar ZnO Thin Films

Electrical and Optical Properties of Al–N Co-Doped P-Type Zinc Oxide Films

Preparation and Characteristics of P-Type Zno Films by Dc Reactive Magnetron Sputtering

Control of Conduction Type in Al- and N-codoped ZnO Thin Films

Properties of N-doped ZnO thin films in annealing process

High-Mobility Sb-Doped P-Type Zno by Molecular-Beam Epitaxy

Acceptor Formation Mechanisms Determination from Electrical and Optical Properties of P-Type ZnO Doped with Lithium and Nitrogen

Study on the Hall-effect and Photoluminescence of N-doped P-Type ZnO Thin Films

Correlation Between Carrier Recombination and P-Type Doping in P Monodoped and In–P Codoped ZnO Epilayers

P-Type Behavior in Nominally Undoped Zno Thin Films by Oxygen Plasma Growth

n-type charge transport in heavily p-doped polymers