Abstract:The p-type ZnO films with c-axis orientation are fabricated using Al and N codoping method by DC reactive magnetron sputtering. ZnO films are prepared on a-Al 2O 3 (0001) substrate with different temperature. N acceptor comes from NH 3 and O 2 atmosphere, and Al donor dopant from Zn xAl 1-x(x=0.9) targets. The properties are examined by X-ray diffraction (XRD), atomic force microscopy (AFM), second ion mass spectroscopy (SIMS), Hall measurement, and transmission spectra. The results show that the Al and N codoping ZnO films can be realized at 450°C, 600°C with a p-type conduction, such as resistivity of 10 2-10 3Ω·cm, carrier density of 10 15-10 16cm -3 Hall mobility of 0.5-1.32 cm 2/(V·s). The presence of donor (Al) enhances N incorporation. The p-ZnO films have a transmittance about 90% in visible region and a band gap of 3.28 eV at room temperature. The p-ZnO film obtained at 450°C possesses a smaller size of grain and smoother surface.

Control of Conduction Type in Al- and N-codoped ZnO Thin Films

p-Type conduction in Al–N co-doped ZnO films

P -Type Conduction in N–Al Co-Doped ZnO Thin Films

Preparation and Characteristic of P-Type ZnO Films by Al–N Codoping Technique

Hydrogen‐assisted Nitrogen‐acceptor Doping in ZnO

Roles of Hydrogen and Nitrogen in P-Type Doping of ZnO

Effect of Substrate Temperature on Structural, Electrical and Optical Properties of Al-N Co-Doped Zno Thin Films

Preparation of P-Type ZnO Films by Al+N-codoping Method

P-Type Behavior in In–N Codoped ZnO Thin Films

Preparation and Properties of N-Doped P-Type ZnO Films by Solid-Source Chemical Vapour Deposition with the C -Axis Parallel to the Substrate

Preparation and Characteristics of p-Type ZnO Films Using Al and N Codoping Method by DC Reactive Magnetron Sputtering

Control of P- and N-Type Conductivities in Li-Doped Zno Thin Films

Electrical and Optical Properties of Al–N Co-Doped P-Type Zinc Oxide Films

Control of p- and n-type conductivities in P doped ZnO thin films by using radio-frequency sputtering

Dependence of properties of N?Al codoped p-type ZnO thin films on growth temperature

Reproducibility and Stability of N–Al Codoped P -Type ZnO Thin Films

p-type ZnO films by codoping of nitrogen and aluminum and ZnO-based p–n homojunctions

Study on the Hall-effect and Photoluminescence of N-doped P-Type ZnO Thin Films

Deposition of Al-N Co-Doped P-Type Zn0.95Mg0.05O Thin Films

Effect of Oxygen Partial Pressure Ratios on the Properties of Al–N Co-Doped ZnO Thin Films

Control and Improvement of P-Type Conductivity in Indium and Nitrogen Codoped Zno Thin Films