Abstract:In–N codoped ZnMgO films have been prepared on glass substrates by direct current reactive magnetron sputtering. The p-type conduction could be obtained in ZnMgO films by adjusting the N2O partial pressures. The lowest resistivity was found to be 4.6Ωcm for the p-type ZnMgO film deposited under an optimized N2O partial pressure of 2.3mTorr, with a Hall mobility of 1.4cm2/Vs and a hole concentration of 9.6×1017cm−3 at room temperature. The films were of good crystal quality with a high c-axis orientation of wurtzite ZnO structure. The presence of In–N bonds was identified by X-ray photoelectron spectroscopy, which may enhance the nitrogen incorporation and respond for the realization of good p-type behavior in In–N codoped ZnMgO films. Furthermore, the ZnMgO-based p–n homojunction was fabricated by deposition of an In-doped n-type ZnMgO layer on an In–N codoped p-type ZnMgO layer. The p–n homostructural diode exhibits electrical rectification behavior of a typical p–n junction.

P-Type Behavior in In–N Codoped ZnO Thin Films

Control and Improvement of P-Type Conductivity in Indium and Nitrogen Codoped Zno Thin Films

Hydrogen‐assisted Nitrogen‐acceptor Doping in ZnO

Roles of Hydrogen and Nitrogen in P-Type Doping of ZnO

p-Type conduction in Al–N co-doped ZnO films

Junction Properties of Nitrogen-Doped Zno Thin Films

Formation of p-type ZnMgO thin films by In–N codoping method

P -Type Conduction in N–Al Co-Doped ZnO Thin Films

P-Type Behavior of Nitrogen Doped, Lithium Doped, and Nitrogen-Lithium Codoped Zn0.11mg0.89o Thin Films

Preparation and Characteristic of P-Type ZnO Films by Al–N Codoping Technique

Control of Conduction Type in Al- and N-codoped ZnO Thin Films

P-Type Behavior in Na-doped ZnO Films and ZnO Homojunction Light-Emitting Diodes

p-type ZnO films by codoping of nitrogen and aluminum and ZnO-based p–n homojunctions

P-Type Behavior in Nominally Undoped Zno Thin Films by Oxygen Plasma Growth

P-Type Conduction in Zn-Ion Implanted Inn Films

Preparation and Properties of N-Doped P-Type ZnO Films by Solid-Source Chemical Vapour Deposition with the C -Axis Parallel to the Substrate

Study on the Hall-effect and Photoluminescence of N-doped P-Type ZnO Thin Films

Al–N codoping and p-type conductivity in ZnO using different nitrogen sources

Preparation of P-Type ZnO Films by Al+N-codoping Method

P-Type Conversion of Zno Thin Films by Plasma Immersion Ion Implantation

Mechanism of Na-doped P-Type ZnO Films: Suppressing Na Interstitials by Codoping with H and Na of Appropriate Concentrations