Abstract:In–N codoped ZnMgO films have been prepared on glass substrates by direct current reactive magnetron sputtering. The p-type conduction could be obtained in ZnMgO films by adjusting the N2O partial pressures. The lowest resistivity was found to be 4.6Ωcm for the p-type ZnMgO film deposited under an optimized N2O partial pressure of 2.3mTorr, with a Hall mobility of 1.4cm2/Vs and a hole concentration of 9.6×1017cm−3 at room temperature. The films were of good crystal quality with a high c-axis orientation of wurtzite ZnO structure. The presence of In–N bonds was identified by X-ray photoelectron spectroscopy, which may enhance the nitrogen incorporation and respond for the realization of good p-type behavior in In–N codoped ZnMgO films. Furthermore, the ZnMgO-based p–n homojunction was fabricated by deposition of an In-doped n-type ZnMgO layer on an In–N codoped p-type ZnMgO layer. The p–n homostructural diode exhibits electrical rectification behavior of a typical p–n junction.

P-Type Behavior of Nitrogen Doped, Lithium Doped, and Nitrogen-Lithium Codoped Zn0.11mg0.89o Thin Films

Roles of Hydrogen and Nitrogen in P-Type Doping of ZnO

P-Type Behavior in Li-doped Zn0.9Mg0.1O Thin Films

Hydrogen‐assisted Nitrogen‐acceptor Doping in ZnO

Deposition of Al-N Co-Doped P-Type Zn0.95Mg0.05O Thin Films

The Fabrication of Na Doped P -Type Zn 1− X Mg X O Films by Pulsed Laser Deposition

P-Type Behavior in In–N Codoped ZnO Thin Films

p-Type conduction in Al–N co-doped ZnO films

Control of P- and N-Type Conductivities in Li-Doped Zno Thin Films

Fabrication of P-Type ZnMgO Films Via Pulsed Laser Deposition Method by Using Li As Dopant Source

Preparation and Characterization of p-Type ZnO Using Li-N Dual-Acceptor Doping Method by Pulsed Laser Deposition

Fabrication and Properties of P-Type K Doped Zn1−Mg O Thin Film

Formation of p-type ZnMgO thin films by In–N codoping method

Acceptor Formation Mechanisms Determination from Electrical and Optical Properties of P-Type ZnO Doped with Lithium and Nitrogen

Fabrication of P-Type Li-Doped Zno Films by Pulsed Laser Deposition

P -Type Conduction in N–Al Co-Doped ZnO Thin Films

P-Type Behavior in Na-doped ZnO Films and ZnO Homojunction Light-Emitting Diodes

Low-resistivity, Stable P-Type ZnO Thin Films Realized Using a Li–N Dual-Acceptor Doping Method

Preparation and Characterization of N Doped P-type MgZnO Film

Al–N codoping and p-type conductivity in ZnO using different nitrogen sources