P-Type Conduction in Zn-Ion Implanted Inn Films

W. M. Xie,Q. Y. Xie,H. P. Zhu,W. Wang,H. L. Cai,F. M. Zhang,X. S. Wu
DOI: https://doi.org/10.1088/0022-3727/48/21/215102
2015-01-01
Abstract:We report p-type conductivity in wurtzite indium nitride (InN) experimentally and theoretically. The as-deposited InN films are implanted with various doses of Zn ions. The Hall coefficient is positive for samples with doses of 2.5 ~ 10   ×   1014 ions cm−2 at low temperature and turns negative as the temperature increases. This notable sign change of the Hall coefficient confirms the existence of mobile holes in Zn-implanted InN. Moreover, first principle calculations indicate that Zn may be a more stable p-type dopant in InN than that of Mg and Ba because of its low ionization energy.
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