Detecting P-Type Conduction in Ba-Doped Inn

Q. Y. Xie,W. M. Xie,J. L. Wang,H. P. Zhu,J. H. Yang,L. Sun,X. S. Wu
DOI: https://doi.org/10.1063/1.4790281
IF: 4
2013-01-01
Applied Physics Letters
Abstract:The buried p-type conduction is demonstrated in InN with Ba ion implantation dose increases up to 1 × 1015 ions/cm−2. The in-plane lattice parameter increases by about 1.2% deep in the film due to larger Ba replacing smaller indium (In). The n-type conductivity is also detected at the surface, which may results from the N-deficiency. First-principles calculations show that holes at the surface, induced by Ba ion implantation, are compensated by extra electrons from the In adlayer. The p-type carriers dominate in the bulk layers, which is in good agreement with the experimental results.
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