Homobuffer Thickness Effect on the Conduction Type of Non-Polar ZnO Thin Films

X. H. Pan,P. Ding,J. Y. Huang,H. P. He,Z. Z. Ye,B. Lu
DOI: https://doi.org/10.1016/j.jcrysgro.2014.07.015
IF: 1.8
2014-01-01
Journal of Crystal Growth
Abstract:Non-polar (101¯0) ZnO thin films were epitaxially grown on m-plane sapphire substrates by plasma-assisted molecular beam epitaxy. The homobuffer thickness effect on the conduction type of undoped ZnO thin films is carefully investigated. With a relatively thicker buffer layer, weak p-type conductivity with a hole concentration of 1.6×1016cm−3, a Hall mobility of 0.33cm2V−1s−1, and a resistivity of 1.2×103Ωcm are achieved for the film. By careful analysis of results from low temperature photoluminescence and transmission electron microscopy measurements, a correlation of the 3.32-eV emission to the p-type conductivity in the undoped non-polar ZnO films is revealed and discussed. The results are important to help deepen understanding of the origin of p-type behavior in ZnO-based materials.
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