Abstract:P-type ZnO films with c-axis orientation deposited by DC reactive magnetron sputtering are first reported in this paper. ZnO films were prepared in NH3–O2 atmosphere (ammonia concentration varied from 0% to 67%) with the substrate temperature in the range of 400–550°C. The properties were examined by X-ray diffraction, atomic force microscopy, Hall measurement, spreading resistance processing and optical transmission spectra. Results showed that excess zinc and interstitial hydrogen play important roles in the doping process. The N-doped ZnO film deposited on α-Al2O3 (0001) at a substrate temperature of 500°C and an ammonia concentration of 50% showed p-type conduction with good electrical properties. A carrier density of 3.2×1017cm−3 and resistivity of 35Ωcm were observed. The p-type ZnO films possess a transmittance of about 90% in the visible region and a band gap of 3.21eV at room temperature. In addition, ZnO p–n homojunctions on p-Si(100) substrate (p-ZnO:N/n-ZnO/p-Si) have also been first achieved, which could further open the door for practical applications in diverse optical devices.

P-Type ZnO Films by Monodoping of Nitrogen and ZnO-based P–n Homojunctions

Junction Properties of Nitrogen-Doped Zno Thin Films

Hydrogen‐assisted Nitrogen‐acceptor Doping in ZnO

Roles of Hydrogen and Nitrogen in P-Type Doping of ZnO

p-type ZnO films by codoping of nitrogen and aluminum and ZnO-based p–n homojunctions

Low-resistivity, Stable P-Type ZnO Thin Films Realized Using a Li–N Dual-Acceptor Doping Method

Preparation and Characteristics of P-Type Zno Films by Dc Reactive Magnetron Sputtering

p-Type conduction in Al–N co-doped ZnO films

Preparation and Properties of N-Doped P-Type ZnO Films by Solid-Source Chemical Vapour Deposition with the C -Axis Parallel to the Substrate

Synthesis and Properties of P-Type Nitrogen-Doped ZnO Thin Films by Pulsed Laser Ablation of a Zn-rich Zn3N2 Target

Formation of p-type ZnMgO thin films by In–N codoping method

P-Type Behavior in In–N Codoped ZnO Thin Films

High Temperature Dehydrogenation for Realization of Nitrogen-Doped P-Type ZnO

P-Type Behavior in Na-doped ZnO Films and ZnO Homojunction Light-Emitting Diodes

Structural, electrical and optical properties of N-doped ZnO films synthesized by SS-CVD

P -Type Conduction in N–Al Co-Doped ZnO Thin Films

Study on the Hall-effect and Photoluminescence of N-doped P-Type ZnO Thin Films

Properties of N-doped ZnO thin films in annealing process

P-Type Behavior of Nitrogen Doped, Lithium Doped, and Nitrogen-Lithium Codoped Zn0.11mg0.89o Thin Films

P-Type Conductivity and Stability of Nitrogen-Doped Zinc Oxide Prepared by Magnetron Sputtering

Electrical and Optical Properties of Al–N Co-Doped P-Type Zinc Oxide Films