Raman spectra study of strained SiGe alloys

Shulin Gu,Rong Zhang,Ping Han,Ronghua Wang,Youdou Zheng
1995-01-01
Tien Tzu Hsueh Pao/Acta Electronica Sinica
Abstract:Spectra have been employed to investigate the features of strained SiGe alloys deposited by Rapid Thermal Process and Very Low Pressure Chemical Vapor Deposition (RTP/VLP-CVD) method. Auger Electron Spectroscopy has been used to determine Ge composition in SiGe layer. The Ge atom distribution in high Ge composition SiGe alloy is more homogeneous and random than low Ge composition one. The hydrogen dilution of reaction gases and the full relaxed strain make Ge atom distribute homogeneously in SiGe alloy. These results have been explained by the influence of strain effect, atom migration and hydrogen coverage.
What problem does this paper attempt to address?