Raman-Scattering Spectroscopy of Gesi/Si Strained-Layer Superlattice

Rong Zhang,Youdou Zheng,Shulin Gu,Liqun Hu
DOI: https://doi.org/10.1557/proc-298-145
1993-01-01
Abstract:Raman scattering measurements have been carried out on Si1-x Gex/Si SLS. It is found that the Ge-Ge optic phonon frequency shiit is proportional to strain in the SiGe film, and the Ge-Ge strain shift coefficient is 408cm−1. Based on these study a new method for analyzing the Raman spectra of SiGe/Si SLS has been proposed. Using the new method we can obtain the composition of the alloy sublayers as well as the strain in SLS. The strain distribution in the SiGe/Si SLS has been discussed, and strain in both SiGe and Si sublayers of the SLS have been calculated.
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