Raman Spectra of Relaxation and Thermal Stress in High Ge Content SiGe alloy

崔继锋,叶志镇,吴贵斌,赵炳辉
DOI: https://doi.org/10.3969/j.issn.1673-2812.2005.01.023
2005-01-01
Abstract:In this article the high Ge content SiGe alloys are investigated using Raman spectra. With Mooney's methods, the composition and strain relaxation in the epilayer are demonstrated. The results are recalibrated by HRXRD measurements. The influence of thermal stress on the epilayer is also studied using the results above.
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