Recent Advances in Research and Development on Preparation and Properties of SiGeC Alloys

QI Zhen,YE Zhi-zhen,HUANG Jing-yun,LU Huan-ming,ZHAO Bing-hui
DOI: https://doi.org/10.3969/j.issn.1001-5868.1999.03.003
1999-01-01
Abstract:SiGeC alloys have attracted considerable attention over the past few years.The incorporation of carbon into Si-Ge system provides an additional degree of freedom for band gap and strain engineering.It can make the strain of SiGe relaxed and adjust the band gap as well.In this paper,the strain compensation of SiGe alloys, and the addition of carbon and its influence on the band structure,especially on relaxed SiGeC alloys and SiGe alloys, are summarized,along with discussion of their mechanism.
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