Theoretical Study of Structures and Growth of Strained Si/Ge Superlattices

J ZI,KM ZHANG,XD XIE
DOI: https://doi.org/10.1063/1.103972
IF: 4
1990-01-01
Applied Physics Letters
Abstract:The geometry structures of strained (Si)n/(Ge)n (1≤n≤6) superlattices grown pseudomorphically on (001) oriented Si1−xGex (0≤x≤1) substrates are studied. The calculations indicate that with proper choice of the Ge composition factor x symmetrically strained superlattices can be approximately obtained, which might render the growth of a superlattice with larger thickness possible.
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