Compressive and Tensile Strain Effects on Atomic Distribution in Strained Si-Ge Alloys

SL Gu,YD Zheng,R Zhang,SM Zhu
DOI: https://doi.org/10.1002/1521-396x(199703)160:1<3::aid-pssa3>3.0.co;2-x
1997-01-01
Abstract:The effects of compressive and extensive strain on the atomic distribution have been studied by Raman scattering. Compressive strain will make the atoms distribute inhomogeneously and nonuniformly. This effect can be suppressed by increasing the substrate temperature or increasing the Ge content in the Si-Ge alloy. The atoms are distributed uniformly and randomly in extensively strained Ge-Si alloys.
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