Abstract:This study systematically investigated the influence of (photo-assistance) light exposure on lead zirconate titanate (Pb(ZrxTi1−x)O3, PZT) thin films, with variations of compositions, temperatures and wavelengths of irradiation light. The PZT films were obtained by sol–gel photo-assisted annealing at 150 °C in air atmosphere on Pt coated silicon substrates. They were then baked at 350 °C, and crystallized at 650 °C in air. The physical property analysis results revealed that the UV-photo-assistance affected the microstructure and the texture of the PZT. Furthermore, the influences were strongly dependent on both the film compositions and the wavelengths of the light source. The Fourier transform infrared (FT-IR) spectrometry results showed that the UV-light enhanced the decomposition process within the solution layer and dissociated the organic species during drying at 150 °C, and the observed structural variation of the PZT films was closely associated with the residual amount of their organics after photo-assisted annealing. The UV-absorption spectra of PZT precursors indicated that the enhancement of the organic decomposition was dependent on their photo-sensitivities, which were determined by the compositions and temperatures. Additionally, the analyses of various photo-assistances conducted on the sol–gel solution provided specific information about the interaction between the photo-lights and the solution precursors. The results suggest a preferential decomposition of Ti oligomers during the photochemical annealing process, which is considered as the most important mechanism for structural variations in the photo-assisted PZT film. This study proposed that PZT has a novel texture development mechanism under UV radiation, namely, the photochemical-induced-self-seeding effect. Based on this mechanism, it has become feasible to manipulate the texture of the multi-component materials through the photochemical deposition process.

Eroding of Lead Zirconate Titanate (PZT) Thin Films

Effect of Wet Etching on Properties of Lead Zirconium Titanate During Integration Process

Preparation of PZT Thick Film by a High Speed Sol-gel Method

Study of Fabrication and Etching Processes of PZT Thin Films on Silicon

Fabrication And Etching Processes Of Silicon-Based Pzt Thin Films

A Two-step Wet Etching Process of PZT Thin Film With Ultra-low Undercut for MEMS Applications

Growth and Characterization of Lead Zirconate Titanate (PZT) Thin Films

The post crystallization process of lead zirconate titanate films and effects on dielectric properties

Fabrication of PZT microdevices using a high-yield sol-gel process

Pb(Zr,Ti)O-3 Thin Films Prepared on Pbtio3/Si(100) by Chemical Solution Decomposition Technique

Sol-Gel Process and Properties of Textured Pb(Zr, Ti)O-3 Films on Silicon Wafers

Processing and Thickness Effects on the Microstructure and Electrical Properties of Sol–gel Deposited Pb(Zr, Ti)O3 Films

Wet Chemical Etching of Lead Zirconate Titanate Thin Film for Microelectromechanical Systems Applications

Interface and Surface Characterization of Lead Zirconate Titanate Thin Films Grown by Sol–Gel Method

Magnetically Enhanced Reactive Ion Etching of Lead Zirconate Titanate Thin Film by CHF3 Plasma

Preparation and Etching of Silicon-Based Piezoelectric Thin Films for Integrated Devices

Reduction of etching damage in lead–zirconate–titanate thin films with inductively coupled plasma

Mechanical Properties of Sol–gel Derived Lead Zirconate Titanate Thin Films by Nanoindentation

Growth and ferroelectric properties of sol-gel derived Pb(Zr,Ti)O3 using inorganic zirconium precursor

Photochemical-induced self-seeding effect on lead zirconate titanate thin film

Fabrication of Silicon-Based PZT Films and Process-Induced Damage Problems