Effect of Wet Etching on Properties of Lead Zirconium Titanate During Integration Process

Ming-ming ZHANG,Ze JIA,Cong YIN,Lin-kai WANG,Tian-ling REN

DOI: https://doi.org/10.3969/j.issn.1672-6030.2011.04.013

2011-01-01

Abstract:Amorphous and polycrystalline lead zirconium titanate (PZT) films prepared by means of solgel were etched into different sizes.Compared with the properties of unetched PZT,polarization and endurance properties of PZT were found to degrade after wet etching process.Mechanisms of etching damage were investigated.Phase patterns and surface topologies of PZT were examined,and results show that,non-ferroelectric components are formed in wet etching process,and their permittivity is smaller than that of PZT,which reduces effective applied voltage on the ferroelectric device and causes polarization to decrease.After 1011 fatigue cycles,about 3％ of initial remnant polarization (Pr) is found in unetched PZT.While in etched PZT devices,the Pr loss is more than 5％.Endurance property is found to degrade more severely in smaller devices.The Pr loss in 100 μm × 100 μm PZT device is about 3 times of the value found in 500 μm × 500 μm samples.Defects and vacancies will be generated in wet etching process.At high temperature,they will redistribute and trap more electrons,which will generate internal electric field and pin the domains.Concentrations of defects and vacancies vary with the size of PZT and result in different values of endurance performance.The relationship of piezoelectric parameters and polarization can explain the reason for degradation of piezoelectricity.