Abstract:Ti0.05)O3 (PZT 95/5) thin films of perovskite structure were prepared on various substrates by the radio-frequency magnetron sputtering with a stoichiometric ceramic target. The crystal structure of the films showed a strong dependency on the crystal structure of the substrates. After conventional-furnace annealing at 750 °C, crack-free and transparent epitaxial PZT 95/5 films were successfully obtained on SrTiO3(100) substrates, and highly oriented films on LaAlO3(012). The films on r-sapphire exhibit slightly preferred orientation along both the (040) and (122) axes of the orthorhombic PZT 95/5 phase. The films on YSZ(100) consist principally of the perovskite PZT 95/5 phase with random orientation with a small portion of unknown phase. However, the formation of the perovskite PZT 95/5 phase was not observed in the films on Si(110) or (111)Pt-coated Si substrates. The crystallization of the perovskite PZT 95/5 on these substrates could be improved by rapid thermal annealing (RTA). Single perovskite phase was obtained in the films on (111)Pt/Si which had RTA at 750 °C for 1 min. No tangible loss of Pb from the films occurred during either the sputtering or annealing.

Preparation of PZT Thick Film by a High Speed Sol-gel Method

Growth and Characterization of Lead Zirconate Titanate (PZT) Thin Films

Effect of pyrolysis temperature on preferential orientation and electrical properties of sol-gel derived lead zirconate titanate films

Sol–gel synthesis and characterization of PZT thin films on FTO/aluminoborosilicate glass substrates

Fabrication of (100) Orientated PZT Thin Films for MEMS Applications

The preparation and study on diagnostics of PZT thin films

Pb(Zr,Ti)O-3 Thin Films Prepared on Pbtio3/Si(100) by Chemical Solution Decomposition Technique

Interface and Surface Characterization of Lead Zirconate Titanate Thin Films Grown by Sol–Gel Method

Growth and ferroelectric properties of sol-gel derived Pb(Zr,Ti)O3 using inorganic zirconium precursor

Preparation of (001)-oriented PZT thick films on silicon wafer by pulsed laser deposition

Preparation and characterization of Sol-Gel derived PZT bulk ceramics and thin films

Limits of Formation of Random Grown Perovskite and Pyrochlore Phases in Sol–gel Derived La Modified Lead Zirconate Titanate Thin Films

La Doped PZT 0-3 Thick Film Prepared by Powder-Sol Processing.

Preparation and Characterization of Pb(Zr,Ti)O3 Films on SrTiO3 Substrates

Study of Fabrication and Etching Processes of PZT Thin Films on Silicon

Fabrication And Etching Processes Of Silicon-Based Pzt Thin Films

PZT thin films with preferred-orientation induced by external stress

Epitaxial growth of (PbZr)TiO3 films on LaAlO3 by sol-gel method using inorganic zirconium source

Preparation and Crystallization of Pb(Zr0.95Ti0.05)O3 Thin Films Deposited by Radio-Frequency Magnetron Sputtering with a Stoichiometric Ceramic Target

Surface layers of the sol-gel derived PbTiO3 thin films

Effectof annealing temperature onthe propertiesof PZTferroelectric thinfilms inthe processof RTPwithSol-gel method