Abstract:Lead zirconate titanate Pb(Zr 0.52 Ti 0.48 )O 3 (PZT) thin films was successfully deposited on Pt(111)/Ti/SiO 2 /Si(100) substrates by a new modified sol-gel technique: precursor-monomer method. In this process three separated Pb 2 + , Zr 4 + , Ti 4 + precursor-monomers and metal chelating agents were mixed together to prepare PZT sol-solution (precursor). The precursor-monomer method has several advantages over conventional sol-gel methods, including easy change the atomic ratio of Pb 2 + /Zr 4 + /Ti 4 + and doping metallic ions, rapid PZT precursor synthesis, low processing temperature, without dry condition and distillation, long storage period, simplicity and low cost, etc. The paper investigated the effects of hydrolysis degree on the stability of PZT precursor, and it was found that the sample with 12.5% (v/v) adding water had the longest storage time. The inference of lead titanate (PbTiO 3 , PT) seeding layers on the microstructures, surface morphologies and ferroelectric properties of PZT films has also been systematically examined. We found that PZT films with PT/PZT/PT structure had lower perovskite phase crystallization temperature, larger grain size, better microstructure and ferroelectric properties as compared with no PT seeding layers films.

Epitaxial growth of (PbZr)TiO3 films on LaAlO3 by sol-gel method using inorganic zirconium source

Thickness-dependent structural characteristics of sol–gel-derived epitaxial (PbZr)TiO3 films using inorganic zirconium salt

Growth and ferroelectric properties of sol-gel derived Pb(Zr,Ti)O3 using inorganic zirconium precursor

Preparation of PZT Thick Film by a High Speed Sol-gel Method

Interface and Surface Characterization of Lead Zirconate Titanate Thin Films Grown by Sol–Gel Method

Growth mechanism and characteristics of Pb(Zr 0.52 Ti 0.48 )O 3 films prepared with alternate deposition of PbZrO 3 and PbTiO 3 layers

Growth and Characterization of Lead Zirconate Titanate (PZT) Thin Films

In-situ study on piezoelectric responses of sol-gel derived epitaxial Pb[Zr,Ti]O 3 thin films on Si substrate

Study of silicon-based ferroelectric PZT thin films fabricated by sol-gel method

Precursor-Monomer Method of Sol-Gel for Fabrication Pt/Pzt/Pt Ferroelectric Films

Preparation and Study on Epitaxial Pb(Zr0.52ti0.48)O-3 Ferroelectric Films on Different Substrates

Study of silicon-based ferroelectric thin films prepared by Sol-Gel method

Phase Structure of Epitaxial Pb(Zr,Ti)O-3 Thin Films on Nb-Doped Srtio3 Substrates

Microstructure and Electrical Properties of Lead Zirconate Titanate Thin Films Deposited by Sol-Gel Method on La 0.7 Sr 0.3 MnO 3 /sio 2 /si Substrate

Crystal structure and microstructure of lead zirconate titanate (PZT) thin films with various Zr/Ti ratios grown by hybrid processing

Sol-Gel Process and Properties of Textured Pb(Zr, Ti)O-3 Films on Silicon Wafers

The Microstructure and Ferroelectric Properties of PbZr0.52Ti0.48O3 Films on Mica Substrates

Preparation and Crystallization of Pb(Zr0.95Ti0.05)O3 Thin Films Deposited by Radio-Frequency Magnetron Sputtering with a Stoichiometric Ceramic Target

The Growth and Phase Transitions of Epitaxial Pb(Zr0.95ti0.05)O-3 Thin Films Prepared by Sputter Deposition Combined with Post-Annealing on Srtio3(1 0 0)

Sol–gel synthesis and characterization of PZT thin films on FTO/aluminoborosilicate glass substrates

Preparation and Characterization of Pb(Zr,Ti)O3 Films on SrTiO3 Substrates