Abstract:Pb(Zr,Ti)O3 compositions are under investigation for applications that include integrated capacitors, piezoelectric sensors, and actuators. Sol–gel synthesis and spin coating are popular routes to the formation of high quality, dense, crack free, insulating films. However, the electrical properties of the films are often different than those measured for bulk specimens of the same composition. Pb(Zr0.53Ti0.47)O3 films were deposited from a 2-methoxyethanol based sol–gel system onto Pt/Ti/SiO2//Si substrates via spin-casting. Multiple layers were sequentially deposited and heat-treated to 650°C with the use of a PbO overcoat to ensure complete perovskite phase formation. Film thickness was varied from 0.19 to 0.5μm to study the effect of thickness and residual stress on the dielectric and piezoelectric properties of the polarizable and deformable material. Ex-situ wafer curvature measurements, combined with cross-sectional scanning electron microscopy, allowed for the determination of residual stresses in the thin films calculated by the Stoney equation. The macroscopic boundary conditions were then related to the measured properties of interest, namely dielectric constant, tan δ, and piezoelectric strain coefficient. Measured dielectric constants varied from ∼750 to ∼1000, while d33 values ranged from 30 to 44pm/V, as determined by single-beam heterodyne laser interferometry measurements.

Structural characterization and optical properties of Sol-gel-derived polycrystalline Pb(Zr 0.35 Ti 0.65 )O 3 thin films

Surface layers of the sol-gel derived PbTiO3 thin films

Interface and Surface Characterization of Lead Zirconate Titanate Thin Films Grown by Sol–Gel Method

Thickness-dependent Electrical Properties of Sol–gel Derived Pb(Zr 0.52 Ti 0.48 )O 3 Thick Films Using PbTiO 3 Buffer Layers

Crystallization Behavior of PZT Film Prepared by Sol–gel Route

Thickness-dependent structural characteristics of sol–gel-derived epitaxial (PbZr)TiO3 films using inorganic zirconium salt

Sol–gel derived Pb(Zr,Ti)O3 thin films: Residual stress and electrical properties

Preparation and characterization of Sol-Gel derived PZT bulk ceramics and thin films

Growth and Characterization of Lead Zirconate Titanate (PZT) Thin Films

Microstructure And Properties Of Sol-Gel Pzt Thin Films With Buffer Layers

Preparation and Optical Waveguide Property of Metal Alkoxide Solution-Derived Pb(Zr0.5ti0.5)O-3 Thick Films

Crystal structure and microstructure of lead zirconate titanate (PZT) thin films with various Zr/Ti ratios grown by hybrid processing

Preparation and Characterization of Pb(ZrxTi1-x)O3 Thin Film on Indium Tin Oxide

Sol–gel derived nanocrystalline thin films of PbTiO3 on glass substrate

Epitaxial growth of (PbZr)TiO3 films on LaAlO3 by sol-gel method using inorganic zirconium source

Sol-Gel Process and Properties of Textured Pb(Zr, Ti)O-3 Films on Silicon Wafers

Structure And Optical Properties Of Srtio3 Thin Films Prepared By A Sol-Gel Technique

Research Progress of Pb(Zrx, Ti1-x)O3 Thin Films Prepared by Sol-Gel Method

Characterization of Pb(Zr,Ti)O-3 Thin-Films on Soi Prepared by Excimer-Laser Deposition

Raman Spectroscopy And X-Ray Diffraction Study Of Pbtio3 Thin Films Prepared By Sol-Gel Technique

Preparation and Characterization of Sol–gel Derived (100)-Textured Pb(Zr,Ti)O3 Thin Films: PbO Seeding Role in the Formation of Preferential Orientation