Microstructue and Optical Properties of Mg-doped ZnO Thin Films Prepared by Sol-gel Method

HUANG Kai,LV Jian-guo,LIU Xian-song,TANG Zhen
DOI: https://doi.org/10.16553/j.cnki.issn1000-985x.2010.05.039
2010-01-01
Abstract:Mg-doped ZnO thin films were prepared by sol-gel method on Si(111) and quartz glass substrates.The microstructure,morphology,and photoluminescence of the Mg-doped ZnO thin films were studied by X-ray diffraction,atomic force microscopy,scanning electron microscopy,and fluorescence spectrophotometer.The results indicated that the Mg-doped ZnO thin films are polycrystalline with hexagonal wurtzite structure and a higher preferential c-axis orientation.As the annealing temperature increasing,the lattice constant cdecreases from 0.5288 nm to 0.5278 nm,the root mean square increases from 3.8 nm to 6.5 nm,and the band gap increases from 3.26 eV to 3.31 eV.
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