Abstract:ZnAlO thin films with different Al concentrations were prepared on glass and silicon substrates by Magnetron sputtering in this paper. Scanning electron microscopy (SEM), X-ray diffraction (XRD), spectrometer and other instruments were used to analyze the surface morphology, microstructure, transmittance and Raman spectrum of the films. The results showed that trace Al doping significantly increased the surface morphology and size of ZnAlO thin films; The low doped ZnAlO thin film exhibits a good preferred orientation. As the Al doping concentration increases, the main growth direction of the crystal gradually shifts from (101) to (103), and the grain size decreases with the increase of doping concentration during low doping; When the wavelength of ZnAlO film is less than 330 nm, the transmittance of the film is almost zero; When the wavelength is greater than 350 nm, the transmittance of the thin film decreases with the increase of Al doping concentration, and there is a blue shift trend with the increase of Al concentration. When the wavelength is between 420-900nm, the average transmittance of ZnAlO thin film can reach over 90%, and the transmission performance is good; The ZnAlO thin films all have structural characteristic peaks of wurtzite with a frequency of about 437 cm −1 , and the Raman peak position does not move with the increase of Al concentration.

Surface Topography and Optical Properties of Al-doped ZnO Thin Films by Sol-gel Process

Surface Morphology and Optical Properties of Na-doped ZnO Thin Films

Preparation and Characterization of Na-doped ZnO Thin Films by Sol–gel Method

Preparation and Characterization of Mg-doped ZnO Thin Films by Sol–gel Method

Microstructue and Optical Properties of Mg-doped ZnO Thin Films Prepared by Sol-gel Method

Effect of Solution Concentrations on Crystal Structure, Surface Topographies and Photoluminescence Properties of ZnO Thin Films

Surface Pattern and Optical Properties of In-doped ZnO Thin Films by Hydrothermal Method

Sol-gel Fabrication and Characterization of Al-doped ZnO Thin Films

Effect of Al-doped on Optics and Electricity of ZnO (ZnO∶Al) Thin Films

Structural and Optical Properties of Aluminum-doped ZnO Thin Films Prepared by Sol-Gel Method

Al-doping Effects on Optical Properties of C-axis Orientated ZnO:Al Thin Films Prepared by the Sol-gel Method

Characteristic of Zno Films Prepared by the Sol-Gel Process

Optical Properties of Al-doped ZnO Thin Films by Ellipsometry

Microstructure and Electrical Properties of Al-doped ZnO Thin Films

Effects of Annealing Temperature and Al Doping Concentration on the Optical Properties of ZnO Thin Films by Sol-Gel Technique

Al-Doping Effects on Structure, Electrical and Optical Properties of C-Axis-Orientated Zno : Al Thin Films

MICROSTRUCTURE, OPTICAL AND ELECTRICAL PROPERTIES OF ZnO:Al FILM PREPARED BY SOL-GEL METHOD

The XPS Spectra and Optical Properties of Al Doped ZnO Thin Films

The Study on the Preparation of Al3 + Doped ZnO Thin Films with [002] Oriented by Sol-Gel Method and Its Properties

Effects of Annealing and Dopant Concentration on the Optical Characteristics of ZnO:Al Thin Films by Sol–gel Technique

Microstructure and optical properties of ZnAlO films prepared by Magnetron sputtering