Abstract:Highly optically transparent and electrically conductive Al-doped ZnO (AZO) thin films with varied Al concentrations were synthesized by means of reactive deposition of ZnO host films and in-situ doping of Al by pulsed laser co-ablation of a Zn target and an Al target with the assistance of an oxygen plasma. The optical and electrical properties of AZO films were tailored by the adjustment of Al concentration which was realized by varying the laser fluence on the Al target. The morphology, composition and structure as well as the optical and electrical properties were characterized and the effects of Al doping and post-deposition annealing were investigated. Similar with undoped ZnO, the synthesized AZO films have a hexagonal wurtzite structure with the crystallinity deteriorated, present high visible transparency with the absorption edge blue shifted and show good electrical properties with the electrical conductivity increased. The structural, optical and electrical properties are strongly dependent on Al concentration and are significantly improved after annealing in H2/N2 mixed gas. Annealed AZO films containing 3.0at% Al have optical properties including an absorption edge near 325nm and an optical band gap of 3.67eV and electrical properties covering an electrical resistivity of 5.27 × 10−4Ωcm and a carrier concentration of 1.11 × 1021cm−3 with a Hall mobility of 10.7cm2/V s.

Blue Shift in Absorption Edge and Widening of Band Gap of ZnO by Al Doping and Al–N Co-Doping

Surface Topography and Optical Properties of Al-doped ZnO Thin Films by Sol-gel Process

Influence of Dopant Content on Morphology and Optical Constants of ZnO:Na Films by Sol-Gel Method

Surface Morphology and Optical Properties of Na-doped ZnO Thin Films

Preparation and Characterization of Na-doped ZnO Thin Films by Sol–gel Method

Effects of Al Doping on the Properties of ZnO Thin Films Deposited by Atomic Layer Deposition

Microstructure and Electrical Properties of Al-doped ZnO Thin Films

Absorption edge shift and broadening in nanostructured Al doped ZnO thin films

Tailoring of Optical and Electrical Properties of Transparent and Conductive Al-doped ZnO Films by Adjustment of Al Concentration

Al doping to promote optical transmissibility of ZnO thin films

In-Situ Doping Preparation of Al-Doped Zno Films Via Pulsed Laser Co-Ablation of Zn and Al Targets with Assistance of Oxygen Plasma

Microstructure and optical properties of ZnAlO films prepared by Magnetron sputtering

Influence of Al Doping on the Properties of Zno Thin Films Grown by Atomic Layer Deposition

Effect of Al-doping on morphology, structure, and optical band gap of ZnO thin films synthesized by sol–gel spin-coating technique

Spectroscopic Studies of the Plasma for the Preparation of Al-N Co-Doped ZnO Films

Electrical and Optical Properties of Al–N Co-Doped P-Type Zinc Oxide Films

Structural, electrical and optical properties of N-doped ZnO films synthesized by SS-CVD

Deposition of Al-N Co-Doped P-Type Zn0.95Mg0.05O Thin Films

p-Type conduction in Al–N co-doped ZnO films

Effect of Al-doping on Crystallinity and Microstructure of ZnO:Al Thin Films