Effect of Al-doping on Crystallinity and Microstructure of ZnO:Al Thin Films

陈建林,陈鼎,张世英,陈振华
DOI: https://doi.org/10.3321/j.issn:1004-0609.2009.07.019
2009-01-01
Abstract:Al-doped zinc oxide thin films with c-axis-preferred orientation were prepared on soda-lime glass substrates via sol-gel dip-coating route by using zinc acetate dihydrate as the starting materials.The effects of Al-doping concentration on the crystallinity and microstructure of the films were systematically studied.The results show that Al-doping benefits c-axis-preferred orientation and leads to 2θ of(002) plane shifting to higher angle.The grains with sizes of 15-20 nm are refined with increasing Al-doping concentration.A homogeneous dense microstructure is obtained when Al-doping concentration(mole fraction) is 1%-2% while there are particle agglomerations when the Al-doping concentration is above 2%.As for higher doping concentration(5% and 8%),the films exhibit the exceptional growth of large plate-like crystals and grow into a special morphology.
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