Abstract:Pb(Zr,Ti)O3 compositions are under investigation for applications that include integrated capacitors, piezoelectric sensors, and actuators. Sol–gel synthesis and spin coating are popular routes to the formation of high quality, dense, crack free, insulating films. However, the electrical properties of the films are often different than those measured for bulk specimens of the same composition. Pb(Zr0.53Ti0.47)O3 films were deposited from a 2-methoxyethanol based sol–gel system onto Pt/Ti/SiO2//Si substrates via spin-casting. Multiple layers were sequentially deposited and heat-treated to 650°C with the use of a PbO overcoat to ensure complete perovskite phase formation. Film thickness was varied from 0.19 to 0.5μm to study the effect of thickness and residual stress on the dielectric and piezoelectric properties of the polarizable and deformable material. Ex-situ wafer curvature measurements, combined with cross-sectional scanning electron microscopy, allowed for the determination of residual stresses in the thin films calculated by the Stoney equation. The macroscopic boundary conditions were then related to the measured properties of interest, namely dielectric constant, tan δ, and piezoelectric strain coefficient. Measured dielectric constants varied from ∼750 to ∼1000, while d33 values ranged from 30 to 44pm/V, as determined by single-beam heterodyne laser interferometry measurements.

A Preliminary Raman Investigation of the Lead Titanate Thin Films Via Sol-Gel Process

Preparation of PbTiO3 thin films by a modified Sol-Gel processing

Surface layers of the sol-gel derived PbTiO3 thin films

Raman Spectroscopy and X-ray Diffraction Study of Sol–gel Derived (pb1−xlax)ti1−x/4o3 Thin Films on Si Substrates

Raman Spectroscopy And X-Ray Diffraction Study Of Pbtio3 Thin Films Prepared By Sol-Gel Technique

Interface and Surface Characterization of Lead Zirconate Titanate Thin Films Grown by Sol–Gel Method

Raman-spectroscopy study of PbTiO3 thin films grown on Si substrates by metalorganic chemical vapor deposition

Investigation on the Microstructure and Optical Performance of TiO_2 Films by Sol-Gel Method

Formation and composition analysis of the surface layers in as-fired PbTiO 3 thin films by sol-gel processing

Structural characterization and optical properties of Sol-gel-derived polycrystalline Pb(Zr 0.35 Ti 0.65 )O 3 thin films

Sol–gel derived nanocrystalline thin films of PbTiO3 on glass substrate

Growth and Characterization of Lead Zirconate Titanate (PZT) Thin Films

Studies On The Lanthanum-Modified Lead Titanate Ultrafine Particles By Raman Spectroscopy

Rapid Synthesis and FT-Raman Spectroscopic Study of Lanthanum Modified Lead Titanate Nanocrystals

Sol–gel derived Pb(Zr,Ti)O3 thin films: Residual stress and electrical properties

Precursor-Monomer Method of Sol-Gel for Fabrication Pt/Pzt/Pt Ferroelectric Films

Stress-induced shifting of the morphotropic phase boundary in sol–gel derived Pb(Zr0.5Ti0.5)O3 thin films

Study of the Surface-Layer of Lead Titanate Thin-Film by X-Ray-Diffraction

Growth, structure, and morphology of lead titanate crystallites in the sol-gel derived glass—ceramics

Research Progress of Pb(Zrx, Ti1-x)O3 Thin Films Prepared by Sol-Gel Method

Mechanical Properties of Sol–gel Derived Lead Zirconate Titanate Thin Films by Nanoindentation