Sol–gel synthesis and characterization of PZT thin films on FTO/aluminoborosilicate glass substrates
M. B. Di Marco,L. Imhoff,M. V. Roldán,S. Barolin,M. G. Stachiotti
DOI: https://doi.org/10.1007/s10854-023-10596-3
2023-05-20
Abstract:The deposition of lead zirconate titanate (PZT) thin films on transparent substrates is a relevant issue due to the increasing interest in PZT-based nanocomposites for photovoltaic applications. In this work, PZT thin films were deposited onto fluorine-doped tin oxide (FTO)-coated aluminoborosilicate glass (AG) substrates using a modified sol–gel route. AG substrates have the advantage of high thermal resistance and low cost compared to quartz. Conventional furnace annealing (CFA) and rapid thermal annealing (RTA) processes were compared at different temperatures to determine optimum conditions for the fabrication of good-quality films. Crack-free films of ~ 240 nm thickness were fully crystallized to the perovskite structure with no segregation of secondary phases. The optical band gap slightly increases with the increase of the annealing temperature. Au/PZT/FTO-AG capacitors exhibited good dielectric and ferroelectric properties. The best results were obtained for the films treated by CFA at 650 °C, which display well-defined low-frequency hysteresis loops.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied