Abstract:Compact all-pass and add-drop microring resonators (radius=10 μm) integrated with grating couplers working at 2 μm wavelength are designed, fabricated, and characterized on a commercial 340-nm-thick-top-silicon silicon-on-insulator platform. They are suitable for high-volume integrated optical circuits at 2 μm wavelength as the fabrication process involved are uncomplicated and complementary metal-oxide-semiconductor (CMOS)-process compatible, thus making them more convenient to be utilized. The performance of the grating couplers, based on four most important parameters, has been simulated and optimized. The simulation and experimental results of grating couplers show the lowest coupling loss of 4.5 dB and 6.5 Db, respectively. By utilizing the grating couplers to couple light in and out from the chip, the designed microring resonators have been tested. The experimental results of microring resonators show that an extinction ratio of 12 dB and a quality factor of 11,200 can be achieved. To the best of our knowledge, this is thus far the smallest microring resonator ever demonstrated at this wavelength.

Fabrication of High-Q, High-Confinement 4H-Sic Microring Resonators by Surface Roughness Reduction

High-quality Factor, High-Confinement Microring Resonators in 4H-Silicon Carbide-on-insulator

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

High-Confinement, High-Q Microring Resonators on Silicon Carbide-On-Insulator (Sicoi)

High quality factor Si 3 N 4 ring resonators achieved by surface roughness reduction

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Fabrication of the High-Q Si 3 N 4 Microresonators for Soliton Microcombs

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Fabrication and characterization of on-chip silicon spherical-like microcavities with high Q-factors

Fabrication of High Optical Quality Factor Free-Standing As2S3 Microdisk Resonators on a Silicon Chip

Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

Overcoming Si3N4 film stress limitations for High Quality factor ring resonators

4H-Sic Microring Resonators for Nonlinear Integrated Photonics.

Concentric Silicon Micro-Ring Resonators with Enhanced Transmission Notch Depth

Investigation Of Nano Sic Resonator

Fabrication of SiO2 Microdisk Optical Resonator

Dry-etched Ultrahigh-Q Silica Microdisk Resonators on a Silicon Chip

Fabrication of Ultra-High Q Silica Microdisk Using Chemo-Mechanical Polishing

High Quality Factor PECVD Si3N4 Ring Resonators Compatible with CMOS Process

High-Q Microring Resonators with 2$\,\times\,$ 2 Angled Multimode Interference Couplers