Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

M. Wang,J. Lin,Y. Xu,Z. Fang,Z. Liu,W. Fang,Y. Cheng

DOI: https://doi.org/10.1364/cleo_at.2016.jth2a.39

2016-01-01

Abstract:We report on fabrication of on-chip lithium niobate (LN) microresonators with high Q/V ratio by femtosecond laser micromachining. A Purcell-factor of 2.8×10 3 is obtained in a microdisk with a diameter of 6.42 μm.

What problem does this paper attempt to address?

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Min Wang,Jintian Lin,Yingxin Xu,Zhiwei Fang,Lingling Qiao,Z. Liu,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1016/j.optcom.2016.05.025

IF: 2.4

2017-01-01

Optics Communications

Abstract:Femtosecond laser micromachining has been a promising technique for fabricating three-dimensional (3D) micro/nano-structures in various kinds of dielectric materials with unprecedented spatial resolutions as well as flexibility in terms of the geometry and the materials can be processed. This unique capability opens opportunities for fabrication of 3D high-quality (Q) microresonators, which are one of the key elements in modern photonic applications. Here, we review the recent progress in fabrication of high-Q microresonators on glass and crystalline substrates by employing femtosecond laser direct writing. We demonstrate the applications of the fabricated microresonators in generating low-threshold lasers, high-sensitivity chemical sensing and nonlinear optical wavelength conversion.
Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Jintian Lin,Yingxin Xu,Jiangxin Song,Jialei Tang,Zhiwei Fang,Min Wang,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1117/12.2071737

2015-01-01

Abstract:We report on fabrication of microresonators of high quality (high-Q) factors in both glass and crystalline materials by femtosecond laser 3D micromachining. Based on this novel approach, we obtained high-Q microresonators of non-in-plane geometries in glass materials such as fused silica and Nd:glass and demonstrated lasing at a pump power as low as 69 microwatts. We also fabricated on-chip microresonators of sub-100 mu m diameters in crystalline materials including calcium fluoride and lithium niobate, and demonstrated efficient second harmonic generation using the high-Q lithium niobate microresonator. Furthermore, femtosecond laser 3D micromachining allows direct integration of the microresonators with other functional microcomponents, such as a microfluidic mixer and a microheater, leading to compact microdevices with enhanced functionalities. Our technique opens new avenues for fabricating high-Q microresonators with either 2D or 3D geometries on various types of dielectric materials.
Fabrication of High-Q Crystalline Microresonators by Femtosecond Laser Direct Writing for Phase Matched Second Harmonic Generation

Jintian Lin,Yingxin Xu,Zhiwei Fang,Min Wang,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1117/12.2211895

2016-01-01

Abstract:We report on phase matched second harmonic generation (SHG) in an on-chip high-Q lithium niobate (LN) microresonator fabricated by femtosecond laser. Highly efficient SHG process was demonstrated with a normalized conversion efficiency of 1.106×10 −3 /mW.
Monolithic Integration of a Lithium Niobate Microresonator with a Free-Standing Waveguide Using Femtosecond Laser Assisted Ion Beam Writing.

Zhiwei Fang,Yingxin Xu,Min Wang,Lingling Qiao,Jintian Lin,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1038/srep45610

IF: 4.6

2017-01-01

Scientific Reports

Abstract:We demonstrated integrating a high quality factor lithium niobate microdisk resonator with a free-standing membrane waveguide. Our technique is based on femtosecond laser direct writing which produces the pre-structure, followed by focused ion beam milling which reduces the surface roughness of sidewall of the fabricated structure to nanometer scale. Efficient light coupling between the integrated waveguide and microdisk was achieved, and the quality factor of the microresonator was measured as high as 1.67 × 105.
Monolithic Integration of a High-Quality Factor Lithium Niobate Microresonator with a Free-Standing Membrane Waveguide Using Femtosecond Laser Assisted Ion Beam Writing (FLAIBW)

Zhiwei Fang,Yingxin Xu,Min Wang,Lingling Qiao,Jintian Lin,Wei Fang,Ya Cheng

DOI: https://doi.org/10.48550/arxiv.1701.05374

2017-01-01

Abstract:We demonstrate integrating a high quality factor lithium niobate microdisk resonator with a free-standing membrane waveguide. Our technique is based on femtosecond laser direct writing which produces the pre-structure, followed by focused ion beam milling which reduces the surface roughness of sidewall of the fabricated structure to nanometer scale. Efficient light coupling between the integrated waveguide and microdisk was achieved, and the quality factor of the microresonator was measured as high as 1.67*10^5.
Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

Jintian Lin,Yingxin Xu,Zhiwei Fang,Min Wang,Jiangxin Song,Nengwen Wang,Lingling Qiao,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1038/srep08072

IF: 4.6

2015-01-28

Scientific Reports

Abstract:AbstractWe report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 105 around 1550 nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.

multidisciplinary sciences
Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Renhong Gao,Haisu Zhang,Fang Bo,Wei Fang,Zhenzhong Hao,Ni Yao,Jintian Lin,Jianglin Guan,Li Deng,Min Wang,Lingling Qiao,Ya Cheng

DOI: https://doi.org/10.1088/1367-2630/ac3d52

2021-01-01

New Journal of Physics

Abstract:Microresonators of ultrahigh quality (Q) factors represent a crucial type of photonic devices aiming at ultra-high spectral resolution, ultra-high sensitivity to the environmental perturbations, and efficient nonlinear wavelength conversions at low threshold pump powers. Lithium niobate on insulator (LNOI) microdisks of high Q factors are particularly attractive due to its large second-order nonlinear coefficient and strong electro-optic property. In this letter, we break through the long standing bottleneck in achieving the Q factors of LNOI microresonators beyond 108, which approaches the intrinsic material absorption limit of lithium niobate (LN). The ultra-high Q factors give rise to a rich family of nonlinear optical phenomena from optical parametric oscillation (OPO) to harmonics generation with unprecedented characteristics including ultra-low pump threshold, high wavelength conversion efficiency, and ultra-broad operation bandwidth. Specifically, the threshold of OPO is measured to be only 19.6 μW, and the absolute conversion efficiency observed in the second harmonic generation reaches 23%. The record-breaking performances of the on-chip ultra-high Q LNOI microresonators will have profound implication for both photonic research and industry.
On-Chip Electro-Optic Tuning of A Lithium Niobate Microresonator with Integrated In-Plane Microelectrodes

Min Wang,Yingxin Xu,Zhiwei Fang,Yang Liao,Peng Wang,Wei Chu,Lingling Qiao,Jintian Lin,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1364/oe.25.000124

IF: 3.8

2017-01-01

Optics Express

Abstract:We report on on-chip electro-optic tuning of high-Q lithium niobate microresonator with integrated in-plane microelectrodes fabricated by femtosecond laser. Due to the compact spatial arrangement, high electro-optical tuning coefficient of 3.41 pm/V was demonstrated.
Fabrication of Optical Cavities with Femtosecond Laser Pulses

Jintian Lin,Jiangxin Song,Jialei Tang,Wei Fang,Koji Sugioka,Ya Cheng

DOI: https://doi.org/10.1117/12.2041353

2014-01-01

Abstract:We report on fabrication of three-dimensional (3D) high-quality (Q) whispering-gallery-mode microcavities by femtosecond laser micromachining. The main fabrication procedures include the formation of on-chip freestanding microdisk through selective material removal by femtosecond laser pulses, followed by surface smoothing processes (CO2 laser reflow for amorphous glass and focused ion beam (FIB) sidewall milling for crystalline materials) to improve the Q factors. Fused silica microcavities with 3D geometries are demonstrated with Q factors exceeding 106. A microcavity laser based on Nd:glass has been fabricated, showing a threshold as low as 69μW via free space continuous-wave optical excitation at the room temperature. CaF2 crystalline microcavities with Q factor of ~4.2×104 have also been demonstrated. This technique allows us to fabricate 3D high-Q microcavities in various transparent materials such as glass and crystals, which will benefit a broad spectrum of applications such as nonlinear optics, quantum optics, and bio-sensing.
Ultra-high-Q Microcavities Fabricated on Fused Silica Chips by Three-Dimensional Femtosecond Laser Microfabrication

J. Lin,W. Fang,Y. Cheng,S. J. Yu,Y. G. Ma,F. He,L. Qiao,L. Tong,Z. Xu

DOI: https://doi.org/10.1364/cleo_at.2012.cth5c.9

2012-01-01

Abstract:We report on fabrication of ultra-high-Q (~106) whispering gallery microcavities on a fused silica chip using a femtosecond laser, enabled by the high spatial resolution and three-dimensional nature of femtosecond laser direct writing.
Low-threshold Whispering-Gallery-mode Microlasers Fabricated in a Nd:glass Substrate by Three-Dimensional Femtosecond Laser Micromachining.

Jintian Lin,Yingxin Xu,Jiangxin Song,Bin Zeng,Fei He,Huailiang Xu,Koji Sugioka,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1364/ol.38.001458

IF: 3.6

2013-01-01

Optics Letters

Abstract:We report on fabrication of whispering-gallery-mode microlasers in a Nd:glass chip by femtosecond laser three-dimensional micromachining. The main fabrication procedures include the fabrication of freestanding microdisks supported by thin pillars by femtosecond laser ablation of the glass substrate immersed in water, followed by CO2 laser annealing for surface smoothing. The quality (Q) factor of the fabricated microcavity is measured to be 1.065×10(6). Lasing is observed at a pump threshold as low as ~69 μW at room temperature with a continuous-wave laser diode operating at 780 nm. This technique allows for fabrication of microcavities of high Q factors in various dielectric materials, such as glasses and crystals.
Electro-optic tuning of a single-frequency ultranarrow linewidth microdisk laser

Jintian Lin,Saeed Farajollahi,Zhiwei Fang,Ni Yao,Renhong Gao,Jianglin Guan,Li Deng,Tao Lu,Min Wang,Haisu Zhang,Wei Fang,Lingling Qiao,Ya Cheng

DOI: https://doi.org/10.1117/1.AP.4.3.036001

IF: 13.582

2022-01-01

Advanced Photonics

Abstract:Single-frequency ultranarrow linewidth on-chip microlasers with a fast wavelength tunability play a game-changing role in a broad spectrum of applications ranging from coherent communication, light detection and ranging, to metrology and sensing. Design and fabrication of such light sources remain a challenge due to the difficulties in making a laser cavity that has an ultrahigh optical quality (Q) factor and supports only a single lasing frequency simultaneously. Here, we demonstrate a unique single-frequency ultranarrow linewidth lasing mechanism on an erbium ion-doped lithium niobate (LN) microdisk through simultaneous excitation of high-Q polygon modes at both pump and laser wavelengths. As the polygon modes are sparse within the optical gain bandwidth compared with the whispering gallery mode counterpart, while their Q factors (above 10 million) are even higher due to the significantly reduced scattering on their propagation paths, single-frequency lasing with a linewidth as narrow as 322 Hz is observed. The measured linewidth is three orders of magnitude narrower than the previous record in on-chip LN microlasers. Finally, enabled by the strong linear electro-optic effect of LN, real-time electro-optical tuning of the microlaser with a high tuning efficiency of similar to 50 pm/100 V is demonstrated.
Ultrahigh quality-factor microresonators fabricated in pristine lithium niobate thin film for efficient nonlinear optics applications

Renhong Gao,Haisu Zhang,Fang Bo,Wei Fang,Zhenzhong Hao,Ni Yao,Jintian Lin,Jianglin Guan,Li Deng,Min Wang,Lingling Qiao,Ya Cheng

2021-01-01

Abstract:State Key Laboratory of High Field Laser Physics and CAS Center for Excellence in Ultra-intense Laser Science, Shanghai Institute of Optics and Fine Mechanics (SIOM), Chinese Academy of Sciences (CAS), Shanghai 201800, China. XXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China. State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China. The MOE Key Laboratory of Weak Light Nonlinear Photonics, TEDA Applied Physics Institute and School of Physics, Nankai University, Tianjin 300457, China. State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China. University of Chinese Academy of Sciences, Beijing 100049, China. Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China. Collaborative Innovation Center of Light Manipulations and Applications, Shandong Normal University, Jinan 250358, China. Shanghai Research Center for Quantum Sciences, Shanghai 201315, China. These authors contributed equally to the work.
Highly-efficient second and third harmonic generation in a monocrystalline lithium niobate microresonator.

Jintian Lin,Yao Ni,Zhenzhong Hao,Jianhao Zhang,Wenbo Mao,Min Wang,Wei Chu,Rongbo Wu,Zhiwei Fang,Lingling Qiao,Wei Fang,Fang Bo,Ya Cheng

2018-01-01

Abstract:Nonlinear optics in whispering-gallery-mode (WGM) microresonators have attracted much attention. Owing to strong confinement of the light in a small volume, a WGM microresonator can dramatically boost the strength of light field, giving rise to enhancement of the nonlinear interactions of light with the resonator material. Here, we demonstrate highly efficient second harmonic generation (SHG) and third harmonic generation (THG) in an on-chip monocrystalline lithium niobate (LN) microresonator. Benefitting from a cyclic phase matching scheme for the transverse-electric WGMs, nonlinear wavelength conversion utilizing the largest second-order nonlinear coefficient d33, which has not been demonstrated until now despite of its obvious advantage, is successfully achieved in an X-cut LN microresonator. We obtain high conversion efficiencies in not only the SHG (3.8% mW^-1) but also the THG (0.3% mW^-2) realized through a cascaded sum-frequency process. Our results represent a major step toward the classical and quantum photonic integrated circuits.
Advancing Integrated Photonics and Microreactor Technologies with Ultrafast Laser Processing

Min Wang,Zhiwei Fang,Jia Qi,Junxia Zhou,Zhe Wang,Rongbo Wu,Renhong Gao,Ni Yao,Sanaul Haque,Saeed Farajollahi,Jintian Lin,Wei Fang,Tao Lu,Wei Chu,Ya Cheng

DOI: https://doi.org/10.1117/12.2585248

2021-01-01

Abstract:We present our latest progresses on the development of integrated photonic devices as well as microfluidic chips of unprecedented characteristics and performances using femtosecond laser micromachining. We demonstrate ultra-high Q microresonators in lithium niobate on insulator (LNOI), on-chip micro-laser and waveguide amplifier, and high-throughput micro-chemical reactor. The achievements are the result of persistent effort on improving the precision and efficiency in ultrafast laser processing.
High-quality-factor Optical Microresonators Fabricated on Lithium Niobate Thin Film with an Electro-Optical Tuning Range Spanning over One Free Spectral Range [Invited]

Zhe Wang,Chaohua Wu,Zhiwei Fang,Min Wang,Jintian Lin,Rongbo Wu,Jianhao Zhang,Jianping Yu,Miao Wu,Wei Chu,Tao Lu,Gang Chen,Ya Cheng

DOI: https://doi.org/10.3788/col202119.060002

IF: 2.56

2021-01-01

Chinese Optics Letters

Abstract:We demonstrate high quality (intrinsic Q factor ~2.8×106) racetrack microresonators fabricated on lithium niobate (LN) thin film with a free spectral range (FSR) of ~86.38 pm. By integrating microelectrodes alongside the two straight arms of the racetrack resonator, the resonance wavelength around the 1550 nm can be red shifted by 92 pm when the electric voltage is raised from -100 V to 100 V. The microresonators of the tuning range spanning over a full FSR is fabricated using photolithography assisted chemo-mechanical etching (photolithography assisted chemo-mechanical etching, PLACE).
Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

Zhiwei Fang,Ni Yao,Min Wang,Jintian Lin,Jianhao Zhang,Rongbo Wu,Lingling Qiao,Wei Fang,Tao Lu,Ya Cheng

DOI: https://doi.org/10.48550/arXiv.1712.01365

2017-10-20

Abstract:We demonstrate fabrication of a high quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-um-diameter disks with a 200-nm-gap are fabricated. With our device, an optical quality factor as high as 1.2*10^5 is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.

Applied Physics,Optics
Integrated Lithium Niobate Microring Resonators Fabricated With 515 nm Femtosecond Laser Ablation

Jinming Chen,Zhaoxiang Liu,Yuan Zhou,Haisu Zhang,Zhiwei Fang,Lvbin Song,Guanhua Wang,Chao Sun,Min Wang,Ya Cheng

DOI: https://doi.org/10.1109/lpt.2022.3176972

IF: 2.6

2022-06-01

IEEE Photonics Technology Letters

Abstract:Lithium niobate (LiNbO3, LN) on insulator (LNOI) is a promising material platform for integrated photonics to realize high-capacity and high-speed information communication. Here, we developed the 515 nm femtosecond laser micro-machining technique with a 316 nm processing accuracy and demonstrated the fabrication of monolithically integrated waveguide-coupled micro-resonators with the quality factors (Q) of $1.8 imes 10^{5}$ using 515 nm femtosecond laser ablation assisted ions beam etching (IBE) process. The chemical–mechanical polishing (CMP) is adopted to smoothing the etched edge of the hard mask patterned by femtosecond laser ablation. These fabrication techniques are compatible with high efficiency and high precision wafer-scale production, without counting on the UV/E-beam lithography technique, which is essential for LN photonic devices moving towards industrial applications.

engineering, electrical & electronic,optics,physics, applied
Fabrication of a microresonator-fiber assembly maintaining a high-quality factor by CO2 laser welding

Zhiwei Fang,Jintian Lin,Min Wang,Zhengming Liu,Jinping Yao,Lingling Qiao,Ya Cheng

DOI: https://doi.org/10.48550/arXiv.1509.05495

2015-09-18

Optics

Abstract:We demonstrate fabrication of a microtoroid resonator of a high-quality (high-Q) factor using femtosecond laser three-dimensional (3D) micromachining. A fiber taper is reliably assembled to the microtoroid using CO2 laser welding. Specifically, we achieve a high Q-factor of 2.12*10^6 in the microresonator-fiber assembly by optimizing the contact position between the fiber taper and the microtoroid.
Lithium niobate micro-disk resonators of quality factors above 10^7

Rongbo Wu,Jianhao Zhang,Ni Yao,Wei Fang,Lingling Qiao,Zhifang Chai,Jintian Lin,Ya Cheng

DOI: https://doi.org/10.1364/OL.43.004116

2018-05-16

Abstract:We report on fabrication of crystalline lithium niobate microresonators with quality factors above 10^7 as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the lithium niobate on insulate (LNOI) into a microdisk, followed by a chemo-mechanical polishing process for transferring the disk-shaped pattern to the LNOI. Nonlinear processes including second harmonic generation and Raman scattering have been demonstrated in the fabricated microdisk.

Applied Physics,Optics

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Fabrication of High-Q Crystalline Microresonators by Femtosecond Laser Direct Writing for Phase Matched Second Harmonic Generation

Monolithic Integration of a Lithium Niobate Microresonator with a Free-Standing Waveguide Using Femtosecond Laser Assisted Ion Beam Writing.

Monolithic Integration of a High-Quality Factor Lithium Niobate Microresonator with a Free-Standing Membrane Waveguide Using Femtosecond Laser Assisted Ion Beam Writing (FLAIBW)

Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

On-Chip Electro-Optic Tuning of A Lithium Niobate Microresonator with Integrated In-Plane Microelectrodes

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Ultra-high-Q Microcavities Fabricated on Fused Silica Chips by Three-Dimensional Femtosecond Laser Microfabrication

Low-threshold Whispering-Gallery-mode Microlasers Fabricated in a Nd:glass Substrate by Three-Dimensional Femtosecond Laser Micromachining.

Electro-optic tuning of a single-frequency ultranarrow linewidth microdisk laser

Ultrahigh quality-factor microresonators fabricated in pristine lithium niobate thin film for efficient nonlinear optics applications

Highly-efficient second and third harmonic generation in a monocrystalline lithium niobate microresonator.

Advancing Integrated Photonics and Microreactor Technologies with Ultrafast Laser Processing

High-quality-factor Optical Microresonators Fabricated on Lithium Niobate Thin Film with an Electro-Optical Tuning Range Spanning over One Free Spectral Range [Invited]

Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

Integrated Lithium Niobate Microring Resonators Fabricated With 515 nm Femtosecond Laser Ablation

Fabrication of a microresonator-fiber assembly maintaining a high-quality factor by CO2 laser welding

Lithium niobate micro-disk resonators of quality factors above 10^7