Lithium niobate micro-disk resonators of quality factors above 10^7

Rongbo Wu,Jianhao Zhang,Ni Yao,Wei Fang,Lingling Qiao,Zhifang Chai,Jintian Lin,Ya Cheng
DOI: https://doi.org/10.1364/OL.43.004116
2018-05-16
Abstract:We report on fabrication of crystalline lithium niobate microresonators with quality factors above 10^7 as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the lithium niobate on insulate (LNOI) into a microdisk, followed by a chemo-mechanical polishing process for transferring the disk-shaped pattern to the LNOI. Nonlinear processes including second harmonic generation and Raman scattering have been demonstrated in the fabricated microdisk.
Applied Physics,Optics
What problem does this paper attempt to address?