Abstract:Thin-film lithium niobate (TFLN) has been considered as one of the most important platforms for constructing high-performance photonic integrated devices such as electro-optic modulators, frequency combs, classical/quantum light sources, and large-scale photonic integrated circuits, benefiting from its excellent optical properties of TFLN. The fabrication quality of TFLN photonic integrated devices plays an important role in the performance and the integration scale of these devices. As one of the element photonic structures, the state-of-the-art TFLN microrings reach an intrinsic Q factor higher than 10^7 with ultra-smooth sidewalls, fabricated by photolithography assisted chemo-mechanical etching (PLACE). However, it is isolated on the chip surface and a tapered fiber is required to couple the light into and out of the resonator. Furthermore, it is difficult to maintain such high-Q factors when the microrings are monolithically integrated with bus waveguides by PLACE, resulted from large coupling loss with biggish coupling gap. Here, a relatively narrow gap of an ultra-high Q microring monolithically integrated with the bus-waveguide is achieved with 3.8 um by optimizing PLACE process, and a high temperature annealing is carried out to improve the loaded (intrinsic) Q factor with 4.29 X 10^6 (4.04 X 10^7), leading an ultra-low propagation loss of less than 1 dB/m, which is approximately 3 times better than the best values previously reported in ion-slicing TFLN platform.

Monolithic Integration of a High-Quality Factor Lithium Niobate Microresonator with a Free-Standing Membrane Waveguide Using Femtosecond Laser Assisted Ion Beam Writing (FLAIBW)

Monolithic Integration of a Lithium Niobate Microresonator with a Free-Standing Waveguide Using Femtosecond Laser Assisted Ion Beam Writing.

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Fabrication of High-Q Crystalline Microresonators by Femtosecond Laser Direct Writing for Phase Matched Second Harmonic Generation

Advancing Integrated Photonics and Microreactor Technologies with Ultrafast Laser Processing

Simultaneous generation of four-wave mixing and stimulated Raman scattering in coupled lithium niobate microdisks mediated by second harmonic generation

On-Chip Electro-Optic Tuning of A Lithium Niobate Microresonator with Integrated In-Plane Microelectrodes

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Ultrahigh quality-factor microresonators fabricated in pristine lithium niobate thin film for efficient nonlinear optics applications

Strong Nonlinear Optics In On-Chip Lithium Niobate Photonic Molecules Fabricated By Femtosecond Laser

Integrated Lithium Niobate Microring Resonators Fabricated With 515 nm Femtosecond Laser Ablation

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Highly-efficient second and third harmonic generation in a monocrystalline lithium niobate microresonator.

Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

High-quality-factor Optical Microresonators Fabricated on Lithium Niobate Thin Film with an Electro-Optical Tuning Range Spanning over One Free Spectral Range [Invited]

An Ultra-High-Q Lithium Niobate Microresonator Integrated with a Silicon Nitride Waveguide in the Vertical Configuration for Evanescent Light Coupling

Ultra-high Q lithium niobate microring monolithically fabricated by photolithography assisted chemo-mechanical etching