Dispersion-engineered High Quality Lithium Niobate Microring Resonators

Yang He,Hanxiao Liang,Rui Luo,Mingxiao Li,Qiang Lin

DOI: https://doi.org/10.1364/oe.26.016315

2018-01-01

Abstract:We report dispersion-engineered lithium niobate microring resonators with optical Q above one million. In particular, we observed anomalous group-velocity dispersion for all three cavity mode families, with values around -0.5 ps 2 /m.

What problem does this paper attempt to address?

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

M. Wang,J. Lin,Y. Xu,Z. Fang,Z. Liu,W. Fang,Y. Cheng

DOI: https://doi.org/10.1364/cleo_at.2016.jth2a.39

2016-01-01

Abstract:We report on fabrication of on-chip lithium niobate (LN) microresonators with high Q/V ratio by femtosecond laser micromachining. A Purcell-factor of 2.8×10 3 is obtained in a microdisk with a diameter of 6.42 μm.
Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Renhong Gao,Haisu Zhang,Fang Bo,Wei Fang,Zhenzhong Hao,Ni Yao,Jintian Lin,Jianglin Guan,Li Deng,Min Wang,Lingling Qiao,Ya Cheng

DOI: https://doi.org/10.1088/1367-2630/ac3d52

2021-01-01

New Journal of Physics

Abstract:Microresonators of ultrahigh quality (Q) factors represent a crucial type of photonic devices aiming at ultra-high spectral resolution, ultra-high sensitivity to the environmental perturbations, and efficient nonlinear wavelength conversions at low threshold pump powers. Lithium niobate on insulator (LNOI) microdisks of high Q factors are particularly attractive due to its large second-order nonlinear coefficient and strong electro-optic property. In this letter, we break through the long standing bottleneck in achieving the Q factors of LNOI microresonators beyond 108, which approaches the intrinsic material absorption limit of lithium niobate (LN). The ultra-high Q factors give rise to a rich family of nonlinear optical phenomena from optical parametric oscillation (OPO) to harmonics generation with unprecedented characteristics including ultra-low pump threshold, high wavelength conversion efficiency, and ultra-broad operation bandwidth. Specifically, the threshold of OPO is measured to be only 19.6 μW, and the absolute conversion efficiency observed in the second harmonic generation reaches 23%. The record-breaking performances of the on-chip ultra-high Q LNOI microresonators will have profound implication for both photonic research and industry.
Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Min Wang,Ni Yao,Rongbo Wu,Zhiwei Fang,Shilong Lv,Jianhao Zhang,Jintian Lin,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1088/1367-2630/ab97ea

2020-01-01

New Journal of Physics

Abstract:High-quality lithium niobate (LN) thin-film microresonators provide an ideal platform for on-chip nonlinear optical applications. The strict phase-matching condition should be satisfied for an efficient nonlinear optical process, which requires dispersion engineering with an LN microresonator. However, this is challenging in single microresonator, resulting from the fabrication error. Here, we demonstrate strong nonlinear effects in a photonic molecule (PM) structure composed of two strongly coupled lithium niobate microdisks. The size mismatch of the microdisks enables phase matching by employing coupling-induced frequency splitting to compensate for the material and geometric dispersion. With a continuous wave excitation, rich nonlinear optical phenomena including cascaded four-wave mixing and stimulated Raman scattering were observed around the second harmonic signal. Meanwhile, an ultra-high four-wave mixing absolute conversion efficiency of 14% as obtained when the second harmonic signal power is at microwatts level. The LN PM is of great potential for applications in nonlinear integrated photonics.
Lithium Niobate Whispering Gallery Mode Disk Resonator with High Q Factor

Yu Pan,Shilie Zheng,Yanne K. Chembo,Xianmin Zhang

DOI: https://doi.org/10.1109/oecc.2017.8114973

2017-01-01

Abstract:An x-cut millimeter-size lithium niobate whispering gallery mode disk resonator is demonstrated, which is fabricated based on commercially available lithium niobate disk with diameter of 12 mm and thickness of 1 mm. The Q factor is measured using the linewidth method, which is found to be Q=1.2×10 7 , suggesting a very good condition of the WGM disk resonator. In addition, the transmission behaviors of WGM resonance under different incident angles are investigated.
Lithium niobate microring with ultra-high Q factor above 10^8

Renhong Gao,Ni Yao,Jianglin Guan,Li Deng,Jintian Lin,Min Wang,Lingling Qiao,Wei Fang,Ya Cheng

DOI: https://doi.org/10.48550/arXiv.2106.14407

2021-06-28

Abstract:We demonstrate ultra-high Q factor microring resonators close to the intrinsic material absorption limit on lithium niobate on insulator. The microrings are fabricated on pristine lithium niobate (LN) thin film wafer thinned from LN bulk via chemo-mechanical etching without ion slicing and ion etching. A record-high Q factor up to times ten to the power of 8th at the wavelength of 1550 nm is achieved because of the ultra-smooth interface of the microrings and the absence of ion induced lattice damage, indicating an ultra-low waveguide propagation loss of about 0.28 dB per meter. The ultra-high Q microrings will pave the way for integrated quantum light source, frequency comb generation, and nonlinear optical processes.

Optics,Applied Physics
Monolithic Ultrahigh-Q Lithium Niobate Microring Resonator

Mian Zhang,Cheng Wang,Rebecca Cheng,Amirhassan Shams-Ansari,Marko Loncar

DOI: https://doi.org/10.1364/OPTICA.4.001536

2017-12-13

Abstract:We demonstrate an ultralow loss monolithic integrated lithium niobate photonic platform consisting of dry-etched subwavelength waveguides. We show microring resonators with a quality factor of 10$^7$ and waveguides with propagation loss as low as 2.7 dB/m.

Optics,Mesoscale and Nanoscale Physics
Ultrahigh quality-factor microresonators fabricated in pristine lithium niobate thin film for efficient nonlinear optics applications

Renhong Gao,Haisu Zhang,Fang Bo,Wei Fang,Zhenzhong Hao,Ni Yao,Jintian Lin,Jianglin Guan,Li Deng,Min Wang,Lingling Qiao,Ya Cheng

2021-01-01

Abstract:State Key Laboratory of High Field Laser Physics and CAS Center for Excellence in Ultra-intense Laser Science, Shanghai Institute of Optics and Fine Mechanics (SIOM), Chinese Academy of Sciences (CAS), Shanghai 201800, China. XXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China. State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China. The MOE Key Laboratory of Weak Light Nonlinear Photonics, TEDA Applied Physics Institute and School of Physics, Nankai University, Tianjin 300457, China. State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China. University of Chinese Academy of Sciences, Beijing 100049, China. Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China. Collaborative Innovation Center of Light Manipulations and Applications, Shandong Normal University, Jinan 250358, China. Shanghai Research Center for Quantum Sciences, Shanghai 201315, China. These authors contributed equally to the work.
Highly-efficient second and third harmonic generation in a monocrystalline lithium niobate microresonator.

Jintian Lin,Yao Ni,Zhenzhong Hao,Jianhao Zhang,Wenbo Mao,Min Wang,Wei Chu,Rongbo Wu,Zhiwei Fang,Lingling Qiao,Wei Fang,Fang Bo,Ya Cheng

2018-01-01

Abstract:Nonlinear optics in whispering-gallery-mode (WGM) microresonators have attracted much attention. Owing to strong confinement of the light in a small volume, a WGM microresonator can dramatically boost the strength of light field, giving rise to enhancement of the nonlinear interactions of light with the resonator material. Here, we demonstrate highly efficient second harmonic generation (SHG) and third harmonic generation (THG) in an on-chip monocrystalline lithium niobate (LN) microresonator. Benefitting from a cyclic phase matching scheme for the transverse-electric WGMs, nonlinear wavelength conversion utilizing the largest second-order nonlinear coefficient d33, which has not been demonstrated until now despite of its obvious advantage, is successfully achieved in an X-cut LN microresonator. We obtain high conversion efficiencies in not only the SHG (3.8% mW^-1) but also the THG (0.3% mW^-2) realized through a cascaded sum-frequency process. Our results represent a major step toward the classical and quantum photonic integrated circuits.
Lithium niobate micro-disk resonators of quality factors above 10^7

Rongbo Wu,Jianhao Zhang,Ni Yao,Wei Fang,Lingling Qiao,Zhifang Chai,Jintian Lin,Ya Cheng

DOI: https://doi.org/10.1364/OL.43.004116

2018-05-16

Abstract:We report on fabrication of crystalline lithium niobate microresonators with quality factors above 10^7 as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the lithium niobate on insulate (LNOI) into a microdisk, followed by a chemo-mechanical polishing process for transferring the disk-shaped pattern to the LNOI. Nonlinear processes including second harmonic generation and Raman scattering have been demonstrated in the fabricated microdisk.

Applied Physics,Optics
High-quality-factor Optical Microresonators Fabricated on Lithium Niobate Thin Film with an Electro-Optical Tuning Range Spanning over One Free Spectral Range [Invited]

Zhe Wang,Chaohua Wu,Zhiwei Fang,Min Wang,Jintian Lin,Rongbo Wu,Jianhao Zhang,Jianping Yu,Miao Wu,Wei Chu,Tao Lu,Gang Chen,Ya Cheng

DOI: https://doi.org/10.3788/col202119.060002

IF: 2.56

2021-01-01

Chinese Optics Letters

Abstract:We demonstrate high quality (intrinsic Q factor ~2.8×106) racetrack microresonators fabricated on lithium niobate (LN) thin film with a free spectral range (FSR) of ~86.38 pm. By integrating microelectrodes alongside the two straight arms of the racetrack resonator, the resonance wavelength around the 1550 nm can be red shifted by 92 pm when the electric voltage is raised from -100 V to 100 V. The microresonators of the tuning range spanning over a full FSR is fabricated using photolithography assisted chemo-mechanical etching (photolithography assisted chemo-mechanical etching, PLACE).
Cavity-Enhanced Optical Parametric Generation in a Modal-Phase-Matched Lithium Niobate Microring

Rui Luo,Yang He,Hanxiao Liang,Mingxiao Li,Jingwei Ling,Qiang Lin

DOI: https://doi.org/10.1364/cleo_si.2019.sth1j.2

2019-01-01

Abstract:We report cavity-enhanced second-harmonic generation and difference-frequency generation in a high-Q lithium niobate microring resonator with modal phase matching. The second-harmonic generation efficiency is measured to be 1,500% W−1. © 2019 The Author(s)
High-quality Lithium Niobate Photonic Crystal Nanocavities

Haowei Jiang,Xiongshuo Yan,Hanxiao Liang,Rui Luo,Xianfeng Chen,Yuping Chen,Qiang Lin

DOI: https://doi.org/10.1364/optica.4.001251

IF: 10.4

2017-01-01

Optica

Abstract:Lithium niobate (LN) exhibits unique material characteristics that have found many important applications. Scaling LN devices down to a nanoscopic scale can dramatically enhance light-matter interaction that would enable nonlinear and quantum photonic functionalities beyond the reach of conventional means. However, developing LN-based nanophotonic devices turns out to be nontrivial. Although significant efforts have been devoted in recent years, LN photonic crystal structures developed to date exhibit fairly low quality. Here we demonstrate LN photonic crystal nanobeam resonators with optical Q as high as 10^5, more than two orders of magnitude higher than other LN nanocavities reported to date. The high optical quality together with tight mode confinement leads to extremely strong nonlinear photorefractive effect, with a resonance tuning rate of 0.64 GHz/aJ, or equivalently 84 MHz/photon, three orders of magnitude greater than other LN resonators. In particular, we observed intriguing quenching of photorefraction that has never been reported before. The devices also exhibit strong optomechanical coupling with gigahertz nanomechanical mode with a significant f*Q product of 1.47*10^12 Hz. The demonstration of high-Q LN photonic crystal nanoresonators paves a crucial step towards LN nanophotonics that could integrate the outstanding material properties with versatile nanoscale device engineering for diverse intriguing functionalities.
Ultrahigh-Q lithium niobate microring resonator with multimode waveguide.

Chuangchuang Wei,Jianguo Liu,Dechen Li,Qianqian Jia,Jinye Li

DOI: https://doi.org/10.1364/ol.489387

IF: 3.6

2023-04-13

Optics Letters

Abstract:Difficulty in etching lithium niobate (LN) results in a relatively high propagation loss, which necessitates sophisticated processes to fabricate high-quality factor (Q) microresonators. Here, we fabricate a multimode microring resonator with an intrinsic Q of 6 × 106, which exhibits a propagation loss 50 times lower than that of a single-mode LN microring fabricated under the same process. Notably, the excitation of higher-order modes in the multimode microring is effectively suppressed by utilizing the Euler bend. The highly regular transmission spectrum of the resonator demonstrates a free spectral range (FSR) of 56 GHz. Based on this microresonator, we implement a bandpass microwave photonic filter with an ultra-narrow 3 dB bandwidth of 47.5 MHz and a large tuning range of 2-26.5 GHz. It can be anticipated that the combination of existing advanced etching techniques with this work will drive the propagation loss of a LN waveguide closer to the material absorption loss, significantly facilitating the optimization of performance in applications requiring ultrahigh-Q LN microresonators, such as frequency combs, frequency conversion, electro-optic modulation, and quantum photonics.

Physics,Engineering,Medicine
High performance fully etched isotropic microring resonators in thin-film lithium niobate on insulator platform

Meisam Bahadori,Yansong Yang,Lynford L. Goddard,Songbin Gong

DOI: https://doi.org/10.1364/OE.27.022025

2019-05-27

Abstract:We present our design, fabrication, and experimental results for very high-performance isotropic microring resonators with small radii (~ 30 {\mu}m) based on single-mode strip waveguides and transverse magnetic (TM) polarization in a fully etched lithium niobate (Z-cut) thin-film on insulator. The loss of the devices is predicted to be < 10 dB/cm, and is measured to be ~ 7 dB/cm. The measured optical responses of microring resonators exhibit an extinction of ~ 25 dB (close to critical coupling), a 3 dB optical bandwidth of 49 pm (~ 6 GHz) for all-pass structures, an extinction of ~ 10 dB for add-drop structures, and a free spectral range of ~ 5.26 nm, all of which are in excellent agreement with the design. This work is the first step towards ultra-compact and fully isotropic optical modulators in thin-film lithium niobate on insulator.

Applied Physics,Signal Processing
High-Q Chaotic Lithium Niobate Microdisk Cavity

Li Wang,Cheng Wang,Jie Wang,Fang Bo,Mian Zhang,Qihuang Gong,Marko Loncar,Yun-Feng Xiao

DOI: https://doi.org/10.1364/ol.43.002917

IF: 3.6

2018-01-01

Optics Letters

Abstract:Lithium niobate (LN) is the workhorse for modern optoelectronics industry and nonlinear optics. High quality (Q) factor LN microresonators are promising candidates for applications in optical communications, quantum photonics, and sensing. However, the phase-matching requirement of traditional evanescent coupling methods poses significant challenges to achieve high coupling efficiencies of the pump and signal light simultaneously, ultimately limiting the practical usefulness of these high Q factor LN resonators. Here, for the first time, to the best of our knowledge, we demonstrate deformed chaotic LN microcavities that feature directional emission patterns and high Q factors simultaneously. The chaotic LN microdisks are created using conventional semiconductor fabrication processes, with measured Q factors exceeding 106 in the telecommunication band. We show that our devices can be free-space-coupled with high efficiency by leveraging directional emission from the asymmetric cavity. Using this broadband approach, we demonstrate a 58-fold enhancement of free-space collection efficiency of a second harmonic generation signal, compared with a circular microdisk.
Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

Jintian Lin,Yingxin Xu,Zhiwei Fang,Min Wang,Jiangxin Song,Nengwen Wang,Lingling Qiao,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1038/srep08072

IF: 4.6

2015-01-28

Scientific Reports

Abstract:AbstractWe report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 105 around 1550 nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.

multidisciplinary sciences
Dispersion engineering of high-Q silicon microresonators via thermal oxidation

Wei C. Jiang,Jidong Zhang,Nicholas G. Usechak,Qiang Lin

DOI: https://doi.org/10.1063/1.4890986

2014-05-06

Abstract:We propose and demonstrate a convenient and sensitive technique for precise engineering of group-velocity dispersion in high-Q silicon microresonators. By accurately controlling the surface-oxidation thickness of silicon microdisk resonators, we are able to precisely manage the zero-dispersion wavelength while simultaneously further improving the high optical quality of our devices, with the optical Q close to a million. The demonstrated dispersion management allows us to achieve parametric generation with precisely engineerable emission wavelengths, which shows great potential for application in integrated silicon nonlinear and quantum photonics.

Optics
Ultra-high Q lithium niobate microring monolithically fabricated by photolithography assisted chemo-mechanical etching

Chuntao Li,Jianglin Guan,Jintian Lin,Renhong Gao,Min Wang,Lingling Qiao,Li Deng,Ya Cheng

2023-06-18

Abstract:Thin-film lithium niobate (TFLN) has been considered as one of the most important platforms for constructing high-performance photonic integrated devices such as electro-optic modulators, frequency combs, classical/quantum light sources, and large-scale photonic integrated circuits, benefiting from its excellent optical properties of TFLN. The fabrication quality of TFLN photonic integrated devices plays an important role in the performance and the integration scale of these devices. As one of the element photonic structures, the state-of-the-art TFLN microrings reach an intrinsic Q factor higher than 10^7 with ultra-smooth sidewalls, fabricated by photolithography assisted chemo-mechanical etching (PLACE). However, it is isolated on the chip surface and a tapered fiber is required to couple the light into and out of the resonator. Furthermore, it is difficult to maintain such high-Q factors when the microrings are monolithically integrated with bus waveguides by PLACE, resulted from large coupling loss with biggish coupling gap. Here, a relatively narrow gap of an ultra-high Q microring monolithically integrated with the bus-waveguide is achieved with 3.8 um by optimizing PLACE process, and a high temperature annealing is carried out to improve the loaded (intrinsic) Q factor with 4.29 X 10^6 (4.04 X 10^7), leading an ultra-low propagation loss of less than 1 dB/m, which is approximately 3 times better than the best values previously reported in ion-slicing TFLN platform.

Optics,Applied Physics
High‐Q 2D Lithium Niobate Photonic Crystal Slab Nanoresonators

Mingxiao Li,Hanxiao Liang,Rui Luo,Yang He,Qiang Lin

DOI: https://doi.org/10.1002/lpor.201800228

2019-01-01

LASER & PHOTONICS REVIEWS

Abstract:Lithium niobate (LN), known as the silicon of photonics, exhibits outstanding material characteristics with great potential for broad applications. Enhancing light-matter interaction on the nanoscale would result in intriguing device characteristics that enable new physical phenomena to be revealed and novel functionalities inaccessible by conventional means to be realized. High-Q 2D photonic crystal (PhC) slab nanoresonators are particularly suitable for this purpose, which, however, remains an open challenge to be realized on the lithium niobate platform. Here, an important step is taken toward this direction, demonstrating 2D LN PhC slab nanoresonators with optical Q as high as 3.51 x 10(5), about three orders of magnitude higher than other 2D LN PhC structures reported to date. The high optical quality, tight mode confinement, together with specific polarization characteristics of the devices enable the peculiar anisotropy of photorefraction quenching and unique anisotropic thermo-optic nonlinear response to be revealed. They also allow the observation of third-harmonic generation in on-chip LN nanophotonic devices, and a strong orientation-dependent generation of the second harmonic.
Broadband optical frequency comb generation in lithium niobate microring resonator by dispersion engineering

P. Wai,Feng Li,Zhaolong Shi,Dongmei Huang,Zihao Cheng

DOI: https://doi.org/10.1117/12.3009607

2023-11-24

Abstract:Thin film lithium niobate (LN) is considered a promising platform for integrated photonics owing to its exceptional electro-, nonlinear-, and acousto-optic properties. In this work, we propose the generation of broadband optical frequency combs in an LN microring resonator by dispersion engineering. We design the structure of the LN waveguide to adjust the effective refractive index of its fundamental mode so that the microring resonator can generate two dispersive waves near the pump light to achieve a broadband optical frequency comb up to 4/5-octave range (about 110 THz). The broadband frequency comb is crucial for future on-chip LN nonlinear photonics applications.

Physics,Engineering

Dispersion-engineered High Quality Lithium Niobate Microring Resonators

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Lithium Niobate Whispering Gallery Mode Disk Resonator with High Q Factor

Lithium niobate microring with ultra-high Q factor above 10^8

Monolithic Ultrahigh-Q Lithium Niobate Microring Resonator

Ultrahigh quality-factor microresonators fabricated in pristine lithium niobate thin film for efficient nonlinear optics applications

Highly-efficient second and third harmonic generation in a monocrystalline lithium niobate microresonator.

Lithium niobate micro-disk resonators of quality factors above 10^7

High-quality-factor Optical Microresonators Fabricated on Lithium Niobate Thin Film with an Electro-Optical Tuning Range Spanning over One Free Spectral Range [Invited]

Cavity-Enhanced Optical Parametric Generation in a Modal-Phase-Matched Lithium Niobate Microring

High-quality Lithium Niobate Photonic Crystal Nanocavities

Ultrahigh-Q lithium niobate microring resonator with multimode waveguide.

High performance fully etched isotropic microring resonators in thin-film lithium niobate on insulator platform

High-Q Chaotic Lithium Niobate Microdisk Cavity

Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

Dispersion engineering of high-Q silicon microresonators via thermal oxidation

Ultra-high Q lithium niobate microring monolithically fabricated by photolithography assisted chemo-mechanical etching

High‐Q 2D Lithium Niobate Photonic Crystal Slab Nanoresonators

Broadband optical frequency comb generation in lithium niobate microring resonator by dispersion engineering