Abstract:Thin-film lithium niobate (TFLN) has been considered as one of the most important platforms for constructing high-performance photonic integrated devices such as electro-optic modulators, frequency combs, classical/quantum light sources, and large-scale photonic integrated circuits, benefiting from its excellent optical properties of TFLN. The fabrication quality of TFLN photonic integrated devices plays an important role in the performance and the integration scale of these devices. As one of the element photonic structures, the state-of-the-art TFLN microrings reach an intrinsic Q factor higher than 10^7 with ultra-smooth sidewalls, fabricated by photolithography assisted chemo-mechanical etching (PLACE). However, it is isolated on the chip surface and a tapered fiber is required to couple the light into and out of the resonator. Furthermore, it is difficult to maintain such high-Q factors when the microrings are monolithically integrated with bus waveguides by PLACE, resulted from large coupling loss with biggish coupling gap. Here, a relatively narrow gap of an ultra-high Q microring monolithically integrated with the bus-waveguide is achieved with 3.8 um by optimizing PLACE process, and a high temperature annealing is carried out to improve the loaded (intrinsic) Q factor with 4.29 X 10^6 (4.04 X 10^7), leading an ultra-low propagation loss of less than 1 dB/m, which is approximately 3 times better than the best values previously reported in ion-slicing TFLN platform.

High performance fully etched isotropic microring resonators in thin-film lithium niobate on insulator platform

High-Performance Electro-Optic Modulator on Silicon Nitride Platform with Heterogeneous Integration of Lithium Niobate

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

Tunable large free spectral range microring resonators in lithium niobate on insulator

Versatile Tunning of Compact Microring Waveguide Resonator Based on Lithium Niobate Thin Films

Monolithic Ultrahigh-Q Lithium Niobate Microring Resonator

High-efficiency Thin-Film Lithium Niobate Modulator with Highly Confined Optical Modes

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Electro-optically tunable microring resonators in lithium niobate

Ultra-high Q lithium niobate microring monolithically fabricated by photolithography assisted chemo-mechanical etching

Ultrahigh-Q lithium niobate microring resonator with multimode waveguide.

Lithium niobate microring with ultra-high Q factor above 10^8

High-quality-factor Optical Microresonators Fabricated on Lithium Niobate Thin Film with an Electro-Optical Tuning Range Spanning over One Free Spectral Range [Invited]

Concentric Silicon Micro-Ring Resonators with Enhanced Transmission Notch Depth

Modeling And Analysis Of Silicon-On-Insulator Elliptical Microring Resonators For Future High-Density Integrated Photonic Circuits

Tunable and stable micro-ring resonator based on thin-film lithium tantalate

Ultra-High Dynamic Extinction Ratio Electro-Optical Modulator with Coupled Microring on SOI Platform

Improving Linewidth and Extinction Ratio Performances of Lithium Niobate Ring Modulator Using Ring-pair Structure

Integrated Lithium Niobate Microring Resonators Fabricated With 515 nm Femtosecond Laser Ablation

Compact lithium niobate photonic integrated circuits

An Ultra-High-Q Lithium Niobate Microresonator Integrated with a Silicon Nitride Waveguide in the Vertical Configuration for Evanescent Light Coupling