Abstract:The quality factor ( Q factor) is a crucial performance parameter for resonators. In this paper, a novel release method for high-quality micro fused silica shell resonators with teeth-like tines with good surface morphology is proposed. This method is based on femtosecond laser-assisted chemical etching. First, the optimal energy range of femtosecond laser modification is obtained through mechanism analysis. Second, the optimal parameters for a straight line and arc pattern are determined by optimizing the average output power, processing speed, and processing spacing. The results demonstrate why edge breakage in rounded corners is easy under different parameters. Finally, according to these conclusions, the processing is performed on a micro fused silica shell resonator with a Q factor exceeding 6 million. In addition, subsurface damage is rare throughout the fabrication process, and the surface roughness of the released cross section reaches the nanometer level. The improved Q factor helps suppress mechanical thermal noise and reduce zero bias and zero bias drift, constituting the primary method for enhancing the performance of the resonant gyroscope.

Fabrication of a microresonator-fiber assembly maintaining a high-quality factor by CO2 laser welding

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Integration of an optical fiber taper with an optical microresonator fabricated in glass by femtosecond laser 3D micromachining

Monolithic Integration of a High-Quality Factor Lithium Niobate Microresonator with a Free-Standing Membrane Waveguide Using Femtosecond Laser Assisted Ion Beam Writing (FLAIBW)

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Microfiber Resonator in Polymer Matrix.

Monolithic Integration of a Lithium Niobate Microresonator with a Free-Standing Waveguide Using Femtosecond Laser Assisted Ion Beam Writing.

A Simple Approach to Fiber-Based Tunable Microcavity with High Coupling Efficiency

Fusion Spliced Microfiber Closed-Loop Resonators

Ultra-high-Q Microcavities Fabricated on Fused Silica Chips by Three-Dimensional Femtosecond Laser Microfabrication

Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining

Fabrication of High-Q Crystalline Microresonators by Femtosecond Laser Direct Writing for Phase Matched Second Harmonic Generation

Fabrication of a microtoroidal resonator with picometer precise resonant wavelength.

Advancing Integrated Photonics and Microreactor Technologies with Ultrafast Laser Processing

Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

Laser reflow technology on high-Q toroidal microcavity

Six million Q factor micro fused silica shell resonator with teeth-like tines released by femtosecond laser-assisted chemical etching