Abstract:We report on fabrication of a microtoroid resonator of a high-quality factor (i. e., Q-factor of ~3.24x10^6 measured under the critical coupling condition) integrated in a microfluidic channel using femtosecond laser three-dimensional (3D) micromachining. Coupling of light into and out of the microresonator has been realized with a fiber taper that is reliably assembled with the microtoroid. The assembly of the fiber to the microtoroid is achieved by welding the fiber taper onto the sidewall of the microtoroid using CO_2 laser irradiation. The integrated microresonator maintains a high Q-factor of 3.21x10^5 as measured in air, which should still be sufficient for many sensing applications. We test the functionality of the integrated optofluidic sensor by performing bulk refractive index sensing of purified water doped with tiny amount of salt. It is shown that a detection limit of ~1.2x10^-4 refractive index unit can be achieved. Our result showcases the capability of integration of high-Q microresonators with complex microfluidic systems using femtosecond laser 3D micromachining.

Integration of an optical fiber taper with an optical microresonator fabricated in glass by femtosecond laser 3D micromachining

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Fabrication of a microresonator-fiber assembly maintaining a high-quality factor by CO2 laser welding

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

Monolithic Integration of a High-Quality Factor Lithium Niobate Microresonator with a Free-Standing Membrane Waveguide Using Femtosecond Laser Assisted Ion Beam Writing (FLAIBW)

Microfiber Resonator in Polymer Matrix.

A Simple Approach to Fiber-Based Tunable Microcavity with High Coupling Efficiency

Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining

Monolithic Integration of a Lithium Niobate Microresonator with a Free-Standing Waveguide Using Femtosecond Laser Assisted Ion Beam Writing.

Fusion Spliced Microfiber Closed-Loop Resonators

Advancing Integrated Photonics and Microreactor Technologies with Ultrafast Laser Processing

Fabrication of a microtoroidal resonator with picometer precise resonant wavelength.

Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

Laser reflow technology on high-Q toroidal microcavity

Fusion Splicing Soft Glass Microfibers for Photonic Devices

Encapsulation of a fiber taper coupled microtoroid resonator in a polymer matrix

Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

On-chip three-dimensional high-Q microcavities fabricated by femtosecond laser direct writing

Raman lasing and Fano lineshapes in a packaged fiber-coupled whispering-gallery-mode microresonator