Abstract:Owing to their favorable properties including small sizes, tight optical confinement, large fractional evanescent fields, and low waveguiding losses, optical micro-/nanofibers have attracted broad research interest and technological applications in recent years, in which the precision in micro-/nanofiber fabrication is critical to determine their waveguiding properties and performances. Here, we firstly introduce the principles of high-temperature taper drawing of glass fibers. Next, we review typical fabrication methods including flame-heated manual drawing approach, flame-heated mechanical drawing technique, electric-heated mechanical drawing technique and laser-heated mechanical drawing technique. Cons and pros of the above-mentioned techniques are discussed, followed by a brief introduction to the fabrication of polymer micro-/nanofibers. Thirdly, we introduce the principle and techniques of high-precision diameter control in glass micro-/nanofiber fabrication based on a in-situ feedback from the cutoff of high-order waveguiding modes, which can offer a diameter precision down to nanometer level. In addition, several techniques for diameter measurement of a micro-/nanofiber are also introduced. Finally, we end the review with a brief summary in micro-/ nanofiber fabrication, as well as an outlook to future possibilities.

Fabrication of a microtoroidal resonator with picometer precise resonant wavelength.

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

Microfiber Resonator in Polymer Matrix.

A Simple Approach to Fiber-Based Tunable Microcavity with High Coupling Efficiency

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Fabrication of a microresonator-fiber assembly maintaining a high-quality factor by CO2 laser welding

High-quality-factor Optical Microresonators Fabricated on Lithium Niobate Thin Film with an Electro-Optical Tuning Range Spanning over One Free Spectral Range [Invited]

Fabrication of Optical Cavities with Femtosecond Laser Pulses

On-Chip Electro-Optic Tuning of A Lithium Niobate Microresonator with Integrated In-Plane Microelectrodes

Integration of an optical fiber taper with an optical microresonator fabricated in glass by femtosecond laser 3D micromachining

Monolithic Integration of a Lithium Niobate Microresonator with a Free-Standing Waveguide Using Femtosecond Laser Assisted Ion Beam Writing.

Monolithic Integration of a High-Quality Factor Lithium Niobate Microresonator with a Free-Standing Membrane Waveguide Using Femtosecond Laser Assisted Ion Beam Writing (FLAIBW)

Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

A Novel Method to Fabricate On-Chip Ultra-High-q Microtoroid Resonators

Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining

Fusion Spliced Microfiber Closed-Loop Resonators

Fabrication Methods and High-Precision Diameter Control Techniques of Optical Micro-/Nanofibers

Fabrication of Planar Microtoroid Cavities Using High-Power Laser

Laser reflow technology on high-Q toroidal microcavity

Arbitrary Function Resonance Tuner of the Optical Microcavity with Sub-Mhz Resolution.