Abstract:High quality (Q) factor microdisks are fundamental building blocks of on-chip integrated photonic circuits and biological sensors. The resonant modes in microdisks circulate near their boundaries, making their performances strongly dependent upon surface roughness. Surface-tension-induced microspheres and microtoroids are superior to other dielectric microdisks when comparing Q factors. However, most photonic materials such as silicon and negative photoresists are hard to be reflowed and thus the realizations of high-Q microdisks are strongly dependent on electron-beam lithography. Herein, we demonstrate a robust, cost-effective, and highly reproducible technique to fabricate ultrahigh-Q microdisks. By using silica microtoroids as masks, we have successfully replicated their ultrasmooth boundaries in a photoresist via anisotropic dry etching. The experimentally recorded Q factors of passive microdisks can be as large as 1.5 × 106. Similarly, ultrahigh Q microdisk lasers have also been replicated in dye-doped polymeric films. The laser linewidth is only 8 pm, which is limited by the spectrometer and is much narrower than that in previous reports. Meanwhile, high-Q deformed microdisks have also been fabricated by controlling the shape of microtoroids, making the internal ray dynamics and external directional laser emissions controllable. Interestingly, this technique also applies to other materials. Silicon microdisks with Q > 106 have been experimentally demonstrated with a similar process. We believe this research will be important for the advances of high-Q micro-resonators and their applications.

Fabrication and characterization of on-chip silicon spherical-like microcavities with high Q-factors

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Ultra-high-Q Microcavities Fabricated on Fused Silica Chips by Three-Dimensional Femtosecond Laser Microfabrication

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

A New Route for Fabricating Polymer Optical Microcavities.

A Simple Approach to Fiber-Based Tunable Microcavity with High Coupling Efficiency

On-chip three-dimensional high-Q microcavities fabricated by femtosecond laser direct writing

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An Improved Surface-Plasmonic Nanobeam Cavity for Higher Q and Smaller V

High-Q and highly reproducible microdisks and microlasers.

High-Q Photonic Crystal Microcavities

A Novel Method to Fabricate On-Chip Ultra-High-q Microtoroid Resonators

Fabrication of High Optical Quality Factor Free-Standing As2S3 Microdisk Resonators on a Silicon Chip

High- Q Photonic Crystal Cavity in a Single-Mode Silicon Ridge Waveguide

Fabrication of SiO 2 Microdisk Optical Resonator

Dry-etched Ultrahigh-Q Silica Microdisk Resonators on a Silicon Chip

Laser reflow technology on high-Q toroidal microcavity

High-Q Photonic Crystal Nanobeam Cavities on Silicon