Fabrication of High Optical Quality Factor Free-Standing As2S3 Microdisk Resonators on a Silicon Chip

Mingxiao Zhao,Mingming Zhao,Xiaoshun Jiang,Yuan Chen,Jiyang Ma,Min Xiao

2016-01-01

Abstract:We demonstrate a chip-based free-standing As 2 S 3 microdisk resonator with a Q-factor of 9.8×10 5 . The critical coupling condition is achieved by efficiently coupling the modes of the microresonator with a tapered optical fiber.

What problem does this paper attempt to address?

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

M. Wang,J. Lin,Y. Xu,Z. Fang,Z. Liu,W. Fang,Y. Cheng

DOI: https://doi.org/10.1364/cleo_at.2016.jth2a.39

2016-01-01

Abstract:We report on fabrication of on-chip lithium niobate (LN) microresonators with high Q/V ratio by femtosecond laser micromachining. A Purcell-factor of 2.8×10 3 is obtained in a microdisk with a diameter of 6.42 μm.
Dry-etched Ultrahigh-Q Silica Microdisk Resonators on a Silicon Chip

Jiaxin Gu,Jie Liu,Ziqi Bai,Han Wang,Xinyu Cheng,Guanyu Li,Menghua Zhang,Xinxin Li,Qi Shi,Min Xiao,Xiaoshun Jiang

DOI: https://doi.org/10.1364/prj.412840

IF: 7.6

2021-01-01

Photonics Research

Abstract:We demonstrate the fabrication of ultrahigh quality (Q) factor silica microdisk resonators on a silicon chip by inductively coupled plasma (ICP) etching. We achieve a dry-etched optical microresonator with an intrinsic Q factor as high as 1.94 × 10 8 from a 1-mm-diameter silica microdisk with a thickness of 4 μm. Our work provides a chip-based microresonator platform operating in the ultrahigh-Q region that will be useful in nonlinear photonics such as Brillouin lasers and Kerr microcombs.
Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Min Wang,Jintian Lin,Yingxin Xu,Zhiwei Fang,Lingling Qiao,Z. Liu,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1016/j.optcom.2016.05.025

IF: 2.4

2017-01-01

Optics Communications

Abstract:Femtosecond laser micromachining has been a promising technique for fabricating three-dimensional (3D) micro/nano-structures in various kinds of dielectric materials with unprecedented spatial resolutions as well as flexibility in terms of the geometry and the materials can be processed. This unique capability opens opportunities for fabrication of 3D high-quality (Q) microresonators, which are one of the key elements in modern photonic applications. Here, we review the recent progress in fabrication of high-Q microresonators on glass and crystalline substrates by employing femtosecond laser direct writing. We demonstrate the applications of the fabricated microresonators in generating low-threshold lasers, high-sensitivity chemical sensing and nonlinear optical wavelength conversion.
Fabrication of Optical Cavities with Femtosecond Laser Pulses

Jintian Lin,Jiangxin Song,Jialei Tang,Wei Fang,Koji Sugioka,Ya Cheng

DOI: https://doi.org/10.1117/12.2041353

2014-01-01

Abstract:We report on fabrication of three-dimensional (3D) high-quality (Q) whispering-gallery-mode microcavities by femtosecond laser micromachining. The main fabrication procedures include the formation of on-chip freestanding microdisk through selective material removal by femtosecond laser pulses, followed by surface smoothing processes (CO2 laser reflow for amorphous glass and focused ion beam (FIB) sidewall milling for crystalline materials) to improve the Q factors. Fused silica microcavities with 3D geometries are demonstrated with Q factors exceeding 106. A microcavity laser based on Nd:glass has been fabricated, showing a threshold as low as 69μW via free space continuous-wave optical excitation at the room temperature. CaF2 crystalline microcavities with Q factor of ~4.2×104 have also been demonstrated. This technique allows us to fabricate 3D high-Q microcavities in various transparent materials such as glass and crystals, which will benefit a broad spectrum of applications such as nonlinear optics, quantum optics, and bio-sensing.
Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Jintian Lin,Yingxin Xu,Jiangxin Song,Jialei Tang,Zhiwei Fang,Min Wang,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1117/12.2071737

2015-01-01

Abstract:We report on fabrication of microresonators of high quality (high-Q) factors in both glass and crystalline materials by femtosecond laser 3D micromachining. Based on this novel approach, we obtained high-Q microresonators of non-in-plane geometries in glass materials such as fused silica and Nd:glass and demonstrated lasing at a pump power as low as 69 microwatts. We also fabricated on-chip microresonators of sub-100 mu m diameters in crystalline materials including calcium fluoride and lithium niobate, and demonstrated efficient second harmonic generation using the high-Q lithium niobate microresonator. Furthermore, femtosecond laser 3D micromachining allows direct integration of the microresonators with other functional microcomponents, such as a microfluidic mixer and a microheater, leading to compact microdevices with enhanced functionalities. Our technique opens new avenues for fabricating high-Q microresonators with either 2D or 3D geometries on various types of dielectric materials.
Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

Kang Xiong,Xi Xiao,Yingtao Hu,Zhiyong Li,Tao Chu,Yude Yu,Jinzhong Yu

DOI: https://doi.org/10.1117/12.920503

2011-01-01

Abstract:We propose and demonstrate a novel elliptical microdisk resonator which enables single-mode operation with high quality (Q) factor. Such elliptical microdisk resonators with pedestal, which consist of plenty of smoothly changing bends with modified curvature radii, can easily achieve single-mode operation due to selective losses introduced by mode transmission mismatches and small curvature radii portion inside the elliptical microdisks. We fabricated the devices on silicon-on-insulator (SOI) platform. Single-mode resonance with high quality factor (Q) of ~105 was experimentally realized. Besides, the proposed elliptical microdisk provides larger coupling strength compared to normal circular microdisk, and hence enables critical coupling with easy-to-fabricate gaps.
Ultra-high-Q Microcavities Fabricated on Fused Silica Chips by Three-Dimensional Femtosecond Laser Microfabrication

J. Lin,W. Fang,Y. Cheng,S. J. Yu,Y. G. Ma,F. He,L. Qiao,L. Tong,Z. Xu

DOI: https://doi.org/10.1364/cleo_at.2012.cth5c.9

2012-01-01

Abstract:We report on fabrication of ultra-high-Q (~106) whispering gallery microcavities on a fused silica chip using a femtosecond laser, enabled by the high spatial resolution and three-dimensional nature of femtosecond laser direct writing.
A New Route for Fabricating Polymer Optical Microcavities.

Zhang,Ni Yao,Jing Pan,Lei Zhang,Wei Fang,Limin Tong

DOI: https://doi.org/10.1039/c8nr10007a

IF: 6.7

2019-01-01

Nanoscale

Abstract:By using a self-assembly method, SU-8 whispering gallery mode optical microcavities with an ultra-smooth surface (σ < 0.6 nm) and high-Q factors (∼104) are fabricated. As an application of the microcavities, we demonstrate a polydimethylsiloxane packaged temperature sensor with high sensitivity (120 pm per °C) and long-term stability (over one year). These results illustrate broad application potential in ultrasensitive sensors and microlasers.
Fabrication of SiO2 Microdisk Optical Resonator

Wei,Xiaowei Wu,Shaojun Fu,Yong Wang,Yuanji Pei,Yunfeng Xiao,Zhengfu Han

2007-01-01

Abstract:The silica microdisk optical resonator which exhibits whispering-gallery-type modes with quality factors of 9.67*10^(4) is fabricated with photolithographic techniques. Reactive ion beam etching (RIBE) is used to get the silica disks with photoresist masks on SiO2/Si made by standard ultraviolet (UV) photolithography, and spontaneous silicon etching by XeF2 is used to fabricate the silicon micropillars. This fabrication process can control the microcavity geometry, leading to high experiment repeatability and controllable cavity modes. These characteristics are important for many applications in which the microcavity is necessary, such as the quantum gate.
High-Q Silica Microdisk Optical Resonators with Large Wedge Angles on a Silicon Chip

Guanyu Li,Pei Liu,Xiaoshun Jiang,Chao Yang,Jiyang Ma,Hongya Wu,Min Xiao

DOI: https://doi.org/10.1364/prj.3.000279

IF: 7.6

2015-01-01

Photonics Research

Abstract:We experimentally demonstrate high optical quality factor silica microdisk resonators on a silicon chip with large wedge angles by reactive ion etching. For 2-μm-thick microresonators, we have achieved wedge angles of 59°, 63°, 70°, and 79° with optical quality factors of 2.4 × 107, 8.1 × 106, 5.9 × 106, and 7.4 × 106, respectively, from ～80 μmdiameter microresonators in the 1550 nm wavelength band. Also, for 1-μm-thick microresonators, we have obtained an optical quality factor of 7.3 × 106 with a wedge angle of 74°.
Fabrication and characterization of on-chip silicon spherical-like microcavities with high Q-factors

Hailong Han,Hao Li,Lixing You,Xiaoping Liu

DOI: https://doi.org/10.3788/COL202220.111301

IF: 2.56

2022-01-01

Chinese Optics Letters

Abstract:An effective way to fabricate high-quality ( Q) silicon microcavities on-chip is proposed and studied. Our fabrication technique consists of two significant steps: (1) patterning a special silicon micro-pillar by Bosch processes and (2) subsequent reflow of the pillar into a spherical-like microcavity using a laser pulse at 532 nm. Its shape and surface roughness are characterized using a scanning electron microscope and an atomic force microscope. The root-mean-square roughness of the surface is about 0.6 nm. A representative value for the loaded Q- factors of our silicon spherical-like microcavities is on the order of 10(5).
Fabrication of the High-Q Si 3 N 4 Microresonators for Soliton Microcombs

Shuai Wan,Rui Niu,Jin-Lan Peng,Jin Li,Guang-Can Guo,Chang-Ling Zou,Chun-Hua Dong

DOI: https://doi.org/10.3788/col202220.032201

IF: 2.56

2022-01-01

Chinese Optics Letters

Abstract:The microresonator-based soliton microcomb has shown a promising future in many applications. In this work, we report the fabrication of high quality [Q) Si 3 N 4 microring resonators for soliton microcomb generation. By developing the fabrication process with crack isolation trenches and annealing, we can deposit thick stoichiometric Si 3 N 4 film of 800 nm without cracks in the central area. The highest intrinsic Q of the Si 3 N 4 microring obtained in our experiments is about 6 × 10 6 ,corresponding to a propagation loss as low as 0.058 dBm/cm. With such a high Q film, we fabricate microrings with the anomalous dispersion and demonstrate the generation of soliton microcombs with 100 mW on-chip pump power, with an optical parametric oscillation threshold of only 13.4 mW. Our Si 3 N 4 integrated chip provides an ideal platform for researches and applications of nonlinear photonics and integrated photonics.
Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

Jintian Lin,Yingxin Xu,Jialei Tang,Nengwen Wang,Jiangxin Song,Fei He,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1007/s00339-014-8388-1

2014-01-13

Abstract:We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality (Q)-factors of the fabricated microresonators are measured to be 4.2x10^4 at wavelengths near 1550 nm. The Q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. This technique facilitates formation of on-chip microresonators on various kinds of bulk crystalline materials, which can benefit a wide range of applications such as nonlinear optics, quantum optics, and chip-level integration of photonic devices.

Optics
Chip‐Scale Mass Manufacturable High‐Q Silicon Microdisks

Yujie Wang,Nan Zhang,Zhiqiang Jiang,Li Wang,Yunfeng Xiao,Wenzhao Sun,Ningbo Yi,Shuai Liu,Xiao Gu,Shumin Xiao,Qinghai Song

DOI: https://doi.org/10.1002/admt.201600299

IF: 6.8

2017-01-01

Advanced Materials Technologies

Abstract:High‐Q silicon microdisks are fundamental building blocks for on‐chip photonic systems and have been well developed in past decades. However, the practical applications of high‐Q silicon microdisks are facing a dilemma. The high‐Q silicon microdisks are realized with electron‐beam lithography and are hard to be massively fabricated. The standard photolithography usually generates microdisks with rough surfaces and cannot produce high Q resonators. This study addresses this challenge and reports a novel approach to fabricate chip‐scale high‐Q silicon microdisks with standard photolithography and an isotropic etching. While standard photolithography generates microscale roughness on the cavity boundary, these experimental results show that the following isotropic etching process can effectively smooth them. The ultimate surface roughness is even comparable to the microdisks that are fabricated with E‐beam lithography. Consequently, the cavity Q factors are dramatically improved from a few thousand to more than a million. Compared with the conventional approach, this new technique is particularly intriguing. It can produce chip‐scale high‐Q silicon microdisks simultaneously for the first time. This research is a key step for mass fabrication of high‐Q silicon microdisks, and it can boost the advances of silicon microdisks in a number of important applications, such as optical sensing, quantum optics, and integrated optical elements.
Fusion Spliced Microfiber Closed-Loop Resonators

Pan Wang,Lei Zhang,Zongyin Yang,Fuxing Gu,Shanshan Wang,Qing Yang,Limin Tong

DOI: https://doi.org/10.1109/lpt.2010.2049646

IF: 2.6

2010-01-01

IEEE Photonics Technology Letters

Abstract:Based on low-loss fusion splicing of microfibers using a CO laser, we demonstrate free-standing microfiber closed-loop resonators. Loaded Q-factors of 110 500 with a finesse of 15.3 are obtained around 1.5-mu m wavelength in a 2.4-mm-diameter closed-loop resonator suspended in air. The possibility of tuning resonant responses by changing the coupling efficiency is also demonstrated.
Greater Than One Billion Q Factor for On-Chip Microresonators

Lue Wu,Heming Wang,Qifan Yang,Qing-xin Ji,Boqiang Shen,Chengying Bao,Maodong Gao,Kerry Vahala

DOI: https://doi.org/10.1364/ol.394940

IF: 3.6

2020-01-01

Optics Letters

Abstract:High optical quality (Q) factors are critically important in optical microcavities, where performance in applications spanning nonlinear optics to cavity quantum electrodynamics is determined. Here, a record Q factor of over 1.1 billion is demonstrated for on-chip optical resonators. Using silica whispering-gallery resonators on silicon, Q-factor data is measured over wavelengths spanning the C/L bands (100 nm) and for a range of resonator sizes and mode families. A record low sub-milliwatt parametric oscillation threshold is also measured in 9 GHz free-spectral-range devices. The results show the potential for thermal silica on silicon as a resonator material.
High-Q Mid-Infrared Chalcogenide Glass-On-Silicon Resonators for Spectroscopic Chemical Sensing

Hongtao Lin,Yang Xiang,Lan Li,Kati McLaughlin,Yangchen Liu,Yeshwant Chillakuru,Erick Koontz,J. David Musgraves,Kathleen Richardson,Chaoying Ni,Juejun Hu

DOI: https://doi.org/10.1109/sum.2014.42

2013-01-01

Abstract:We fabricated and characterized high-index-contrast As2Se3 micro-disk resonators on silicon with a record loaded Q-factor of 105 at 5.2 μm wavelength. On-chip chemical sensing using cavity-enhanced infrared spectroscopy was demonstrated using the micro-disk device.
Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Zecen Zhang,Geok Ing Ng,Haodong Qiu,Wanjun Wang,Xin Guo,Mohamed S Rouifed,Chongyang Liu,Hong Wang

DOI: https://doi.org/10.1364/AO.56.005444

IF: 1.9

2017-01-01

Applied Optics

Abstract:Compact all-pass and add-drop microring resonators (radius=10 μm) integrated with grating couplers working at 2 μm wavelength are designed, fabricated, and characterized on a commercial 340-nm-thick-top-silicon silicon-on-insulator platform. They are suitable for high-volume integrated optical circuits at 2 μm wavelength as the fabrication process involved are uncomplicated and complementary metal-oxide-semiconductor (CMOS)-process compatible, thus making them more convenient to be utilized. The performance of the grating couplers, based on four most important parameters, has been simulated and optimized. The simulation and experimental results of grating couplers show the lowest coupling loss of 4.5 dB and 6.5 Db, respectively. By utilizing the grating couplers to couple light in and out from the chip, the designed microring resonators have been tested. The experimental results of microring resonators show that an extinction ratio of 12 dB and a quality factor of 11,200 can be achieved. To the best of our knowledge, this is thus far the smallest microring resonator ever demonstrated at this wavelength.
Fabrication of High-Q, High-Confinement 4H-Sic Microring Resonators by Surface Roughness Reduction

Yi Zheng,Minhao Pu,Ailun Yi,Ayman N. Kamel,Martin. R. Henriksen,Asbjorn A. Jorgensen,Xin Ou,Haiyan Ou

DOI: https://doi.org/10.23919/cleo.2019.8750418

2019-01-01

Abstract:We improve the $Q$ of SiC microring resonators with a sub-micron cross-sectional dimension by a factor of six by reducing surface roughness. We achieve a high $Q$ (~73,000) for such a device with anomalous dispersion. © 2019 The Author(s)
Stress-released Si3N4 microresonator fabrication process for optical frequency comb

Liangsen Feng,Wei Li,Yudong Li,Shaowu Chen

DOI: https://doi.org/10.1117/12.2625861

2022-03-27

Abstract:Si3N4 microresonator have been recently widely used in various applications. Key factor of OFC generation is high Qfactor microresonator device and the precisely dispersion control of waveguides. In this paper, low-propagation-loss structure with precisely engineered dispersion properties has been illustrated to realize microresonator-based optical frequency combs operating in the dissipative Kerr soliton regime. We designed a ring with 100 GHz free spectrum range (FSR) with the size of the chip about 5 mm×5 mm. The improvement included that we adopted high temperature annealing to reduce absorption loss, we used metal as hard mask layer before ICP etching of the Si3N4 layer and we etched the Si3N4 layer after deposition of the SiO2 layer to expose the waveguide section. The high Q-factor device need low optical pump power, such as on-chip diode laser and thus realized integrated on-chip microresonator optical frequency comb which was compatible with CMOS and be successfully used in chip-based optical clock and other applications.

Fabrication of High Optical Quality Factor Free-Standing As2S3 Microdisk Resonators on a Silicon Chip

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

Dry-etched Ultrahigh-Q Silica Microdisk Resonators on a Silicon Chip

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

Ultra-high-Q Microcavities Fabricated on Fused Silica Chips by Three-Dimensional Femtosecond Laser Microfabrication

A New Route for Fabricating Polymer Optical Microcavities.

Fabrication of SiO2 Microdisk Optical Resonator

High-Q Silica Microdisk Optical Resonators with Large Wedge Angles on a Silicon Chip

Fabrication and characterization of on-chip silicon spherical-like microcavities with high Q-factors

Fabrication of the High-Q Si 3 N 4 Microresonators for Soliton Microcombs

Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

Chip‐Scale Mass Manufacturable High‐Q Silicon Microdisks

Fusion Spliced Microfiber Closed-Loop Resonators

Greater Than One Billion Q Factor for On-Chip Microresonators

High-Q Mid-Infrared Chalcogenide Glass-On-Silicon Resonators for Spectroscopic Chemical Sensing

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Fabrication of High-Q, High-Confinement 4H-Sic Microring Resonators by Surface Roughness Reduction

Stress-released Si3N4 microresonator fabrication process for optical frequency comb