A New Route for Fabricating Polymer Optical Microcavities.

Zhang,Ni Yao,Jing Pan,Lei Zhang,Wei Fang,Limin Tong
DOI: https://doi.org/10.1039/c8nr10007a
IF: 6.7
2019-01-01
Nanoscale
Abstract:By using a self-assembly method, SU-8 whispering gallery mode optical microcavities with an ultra-smooth surface (σ < 0.6 nm) and high-Q factors (∼104) are fabricated. As an application of the microcavities, we demonstrate a polydimethylsiloxane packaged temperature sensor with high sensitivity (120 pm per °C) and long-term stability (over one year). These results illustrate broad application potential in ultrasensitive sensors and microlasers.
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