Abstract:environments. As a result, we are developing chemical sensors within integrated microfluidic systems for sensitive and selective detection of these pollutants. Our approach is to combine established chemical sensing strategies with microfluidic structures, especially in plastic devices, to achieve a total heavy metal analysis system. In this regard, the combination of three complementary techniques-optical waveguide spectroscopy, electrochemistry and chemical partitioning offers the required selectivity and sensitivity essential for many environmental samples. On-chip optical waveguide spectroscopy promises to yield the necessary high sensitivity but relies on fabrication of optical structures with a material of appropriate refractive index, optical quality, and chemical stability by methods consistent with established fabrication methods. SU-8, the epoxy-based negative photoresist, appears to satisfy these requirements and, thus, has become one of our candidate materials for waveguide fabrication on plastic microchips. Although the SU-8 has been previously used for waveguide fabrication, its optical properties and more specifically the influence of processing conditions on resultant optical properties have not been thoroughly characterized. This work presents an evaluation of SU-8-based multimode waveguides on glass and plastic substrates. Optical constants of waveguides have been characterized by spectroscopic ellipsometric and prism coupling techniques. Additionally, using the latter method, evaluation of propagation losses of various structures with different thicknesses has been made. Ellipsometric and prism coupling measurements gave comparable refractive indices for variously cured SU-8 waveguide materials. Prism coupling analyses proved to be more useful for analysis of the many SU-8 waveguide structures fabricated in the thickness range of 5 to 75 mu m.

Characterization of SU-8 optical multimode waveguides for integrated optics and sensing on microchip devices

A New Route for Fabricating Polymer Optical Microcavities.

Thermal UV Treatment on SU-8 Polymer for Integrated Optics

Bimodal Plasmonic Refractive Index Sensors Based on SU-8 Waveguides

Fabrication of Si/Si1-Xgex Waveguide Wdm Components

Engineering Materials for Mid-Infrared Optical Sensor Applications

Fabrication and Characterization of Small Optical Ridge Waveguides Based on Su-8 Polymer

Fabrication of single-mode ridge SU-8 waveguides based on inductively coupled plasma etching

Characterization of SU-8 Material Based on Substrate Integrated Waveguide Cavities

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Flexible Multilayer Substrate Based Optical Waveguides: Applications to Optical Sensing

Improvements in Fabrication of 3D SU-8 Prisms for Low-Coupling-Loss Interconnections Between Fibers and Waveguides

Characterization of the polymerization of SU-8 photoresist and its applications in micro-electro-mechanical systems (MEMS)

Wafer-Bonded Surface Plasmon Waveguide Biosensors with In-Plane Microfluidic Interfaces

SU-8 Grating Assisted Intermodal Interference in Surface Plasmon Polariton Waveguide

Optical Sensitivity of Waveguides Inscribed in Nanoporous Silicate Framework

High Sensitivity Waveguide Micro-Displacement Sensor Based on Intermodal Interference

A 2D Waveguide Method for Lithography Simulation of Thick SU-8 Photoresist

Compact Silicon-Based Wavelength-Selective Photonic Integrated Devices and the Applications