Abstract:environments. As a result, we are developing chemical sensors within integrated microfluidic systems for sensitive and selective detection of these pollutants. Our approach is to combine established chemical sensing strategies with microfluidic structures, especially in plastic devices, to achieve a total heavy metal analysis system. In this regard, the combination of three complementary techniques-optical waveguide spectroscopy, electrochemistry and chemical partitioning offers the required selectivity and sensitivity essential for many environmental samples. On-chip optical waveguide spectroscopy promises to yield the necessary high sensitivity but relies on fabrication of optical structures with a material of appropriate refractive index, optical quality, and chemical stability by methods consistent with established fabrication methods. SU-8, the epoxy-based negative photoresist, appears to satisfy these requirements and, thus, has become one of our candidate materials for waveguide fabrication on plastic microchips. Although the SU-8 has been previously used for waveguide fabrication, its optical properties and more specifically the influence of processing conditions on resultant optical properties have not been thoroughly characterized. This work presents an evaluation of SU-8-based multimode waveguides on glass and plastic substrates. Optical constants of waveguides have been characterized by spectroscopic ellipsometric and prism coupling techniques. Additionally, using the latter method, evaluation of propagation losses of various structures with different thicknesses has been made. Ellipsometric and prism coupling measurements gave comparable refractive indices for variously cured SU-8 waveguide materials. Prism coupling analyses proved to be more useful for analysis of the many SU-8 waveguide structures fabricated in the thickness range of 5 to 75 mu m.

Fabrication of single-mode ridge SU-8 waveguides based on inductively coupled plasma etching

Fabrication and Characterization of Small Optical Ridge Waveguides Based on Su-8 Polymer

A New Route for Fabricating Polymer Optical Microcavities.

Rib and strip chalcogenide waveguides based on Ge-Sb-Se radio-frequency sputtered films

Fabrication of GaN‐based Ridge Waveguides with Very Smooth and Vertical Sidewalls by Combined Plasma Dry Etching and Wet Chemical Etching

Fabrication of Si/Si1-Xgex Waveguide Wdm Components

Characterization of SU-8 optical multimode waveguides for integrated optics and sensing on microchip devices

Fabrication and Characterization of Suspended SiO2 Ridge Optical Waveguides and the Devices.

Design and Fabrication of SU-8 Polymer-Based Micro-Racetrack Resonators

Optimization of Deep-Etched,Single-Mode GaAs/GaAlAs Optical Rib Waveguides Using Discrete Spectral Index Method

Manufacturing of selectively buried channel waveguide on glass substrate

Influence of Etching Parameters on Sidewall Roughness of Silicon Based Waveguide Etched by Inductively Coupled Plasma

FABRICATION OF SU-8 BASED ELECTRO-OPTIC SWITCH USING ALL-WET ETCHING TECHNIQUE

Analysis of deep-etched, single-mode GaAs/GaAlAs optical rib waveguides using discrete spectral index method

Fabrication Techniques For Polymer/Si Optical Waveguide

Optimized Inductively Coupled Plasma Etching for Poly(Methyl-Methacrylate-Glycidly-Methacrylate) Optical Waveguide

Low Propagation Loss Ge-on-Si Waveguides and Their Dependency on Processing Methods

Fabrication Of Integrated Waveguide Turning Mirror On Silicon-On-Insulator

Gan-Based Ridge Waveguides With Very Smooth And Vertical Sidewalls By Icp Dry Etching And Chemical Etching

SOI Waveguides Fabricated by Wet-Etching Method

Long-wave infrared 1 × 2 MMI based on air-gap beneath silicon rib waveguides.