Abstract:Glass is an ideal material for optical applications, even though only a few micromachining technologies for material ablation are available. These microstructuring methods are limited regarding precision and freedom of design. A micromachining process for glass is laser induced deep etching (LIDE). Without generating micro-cracks, introducing stress, or other damages, it can precisely machine many types of glass. This work uses LIDE to subtractive manufacture structures in glass carrier substrates. Due to its transmission characteristics and refractive index, the glass substrate serves as optical cladding for polymer waveguides. In this paper, the described fabrication process can be divided into two sub-steps. The doctor blade technique and subsequent additive process step is used in manufacturing cavities with U-shaped cross-sections in glass in order to fill the trenches with liquid optical polymers, which are globally UV-cured. Based on the higher refractive index of the polymer, it enables optical waveguiding in the visible to near-infrared wavelength range. This novel, to the best of our knoowledge, manufacturing method is called LDB (LIDE-doctor-blade); it can be the missing link between long-distance transmissions and on-chip solutions on the packaging level. For validation, optical waveguides are examined regarding their geometrical dimensions, surface roughness, and waveguiding ability, such as intensity distribution and length-dependent attenuation.

Manufacturing of selectively buried channel waveguide on glass substrate

Study of selectively buried ion-exchange glass waveguides using backside masking

Manufacturing and Characterization of Buried Optical Waveguide Stack in Glass Substrate

Manufacturing of double-layered multimode optical waveguides in glass substrate

Two Layers of Buried Optical Waveguides in Glass Substrate by Ion Exchange

Rib and strip chalcogenide waveguides based on Ge-Sb-Se radio-frequency sputtered films

Fabrication of silicon-on-glass waveguides

Single-mode-fiber-matched waveguide by silver/sodium ion-exchange and field-assisted ion-diffusion

Manufacturing of Glass-Based Optical Power Splitter by Ion-Exchange Method

Fabrication of Si/Si1-Xgex Waveguide Wdm Components

Integrated multimode optical waveguides in glass using laser induced deep etching

Enhanced Air Microcavity of Channel SPP Waveguide HALby Graphene Material

Fabricating Low Loss Waveguides over a Large Depth in Glass by Temperature Gradient Assisted Femtosecond Laser Writing.

Fabrication of glass-based multimode optical power splitters

Dielectric optical waveguide fabricated on a transparent substrate

Long-wave infrared 1 × 2 MMI based on air-gap beneath silicon rib waveguides.

Design and fabrication of 1 × 32 silica-based arrayed waveguide grating

Fabrication Techniques of Ion-Exchanged-glass-based Waveguides and Related Integrated Optics Components

Standing Surface Acoustic Wave-Assisted Fabrication of Region-Selective Microstructures Via User-Defined Waveguides.

Low Propagation Loss Ge-on-Si Waveguides and Their Dependency on Processing Methods

Fabrication of GaN‐based Ridge Waveguides with Very Smooth and Vertical Sidewalls by Combined Plasma Dry Etching and Wet Chemical Etching