Design and fabrication of 1 × 32 silica-based arrayed waveguide grating

WenHua Long,GuangBo Li,Kemiao Jia,Hongchang Qu,Yanzhe Tang,Yaming Wu,Jianyi Yang,Yuelin Wang-
2005-01-01
Abstract:A 1 × 32 silica-on-silicon-based arrayed waveguide grating is designed and fabricated. The detailed consideration of waveguide bending, coupling between adjacent waveguides, and the taper structure for the design of the arrayed waveguide grating is presented. By applying the high-resolution photomask, PECVD-based silica deposition, reactive ion etching, and 8° end-face polishing, a AWG chip is obtained with crosstalk lower than -28 dB for the adjacent channels and -35 dB for the non-adjacent channels. The average insertion loss is about 4.9 dB and the imbalance is approximately 1.72 dB after the chip is fiber-array coupled and packaged.
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