Compact Arrayed-Waveguide Grating on Silicon-On-Insulator with Integrated Waveguide Turning Mirrors

GB Li,Z Gong,KM Jia,WH Long,JY Yang,XQ Jiang,YL Wang,MH Wang
DOI: https://doi.org/10.1088/0256-307x/22/12/033
2005-01-01
Abstract:A compact arrayed-waveguide grating (AWG) on the silicon-on-insulator material is designed and fabricated with employment of waveguide-integrated turning mirrors (WITMs). By properly setting the incident angle with the value of 45 degrees, the effective area of the WITM AWG is only 1.15 cm x 1.15 cm with the arrayed waveguide area of 0.6 cm x 0.6 cm. The crosstalk of the fabricated 1 x 6 AWG is better than -19 dB. The on-chip insertion loss is about -8.8 dB and the output nonuniformity is less than 0.6 dB. The polarization-dependent central wavelength shift is about 0.048 nm and the polarization dependent loss is neglectable.
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