Abstract:In wavelength-division multiplexing systems, it is important to develop various wavelength-selective components to have flexible and reconfigurable nodes. When using conventional optical waveguides with low index contrast, the sizes of these wavelength-selective components are usually several cm(2), which is too large to integrate more components in a single wafer or chip. In order to improve the integration density and reduce the cost, it is desirable to minimize the component sizes. In our case, two kinds of strongly-confined optical waveguides on silicon wafer are considered for compact wavelength-selective devices. One is the popular silicon-on-insulator (SOI) nanowire and the other is SU-8 strip optical waveguide with an air cladding and a SiO2 insulator layer on a Si substrate. In this paper, we give a review of our recent work on wavelength-selective photonic integrated devices based on these two kinds of silicon-based optical waveguides with strong-confinements. Arrayed-waveguide grating (AWG) and microring resonator (MRR), which are two typical wavelength-selective components are included. First we give a review for several new layouts for SOI-nanowire AWG to have a further size-reduction and our novel designs for diminishing the polarization dependency of AWGs. Secondly we present the design and fabrication of multimode interference (MMI) couplers for MRRs. A novel design method for tapered MMI couplers is presented and the diminishment of polarization in a MMI coupler is proposed by optimizing the tapered MMI section. We also present our experimental results on optical sensor combining MRRs and micro-fluid channel. The measured sensitivity is about 180nm/RIU.

Compact Integrated Waveguide Turning Mirror in SOI

Fabrication Of Integrated Waveguide Turning Mirror On Silicon-On-Insulator

Fabrication Of Compact Turning Mirrors In Silicon-On-Insulator Materials

Tunable Silicon Reflection Cavity Mirror Based on Microring Resonator

Mirror-Integrated Arrayed-Waveguide Grating On Silicon-On-Insulator

Compact Arrayed-Waveguide Grating on Silicon-On-Insulator with Integrated Waveguide Turning Mirrors

Analysis and Optimization of the Arrayed-Waveguide Grating Device with Total Internal Reflection Mirrors Based on Silicon-on-insulator Material

Turning-Mirror-Integrated Arrayed-Waveguide Gratings on Silicon-on-Insulator

A Novel Compact-Structure Arrayed-Waveguide Grating Device

Design and Fabrication of Integrated Optical Waveguide Coupling System Based on SOI

A Novel Design Of Compact-Structure Arrayed-Waveguide Grating Device

Research Progresses of SOI Optical Waveguide Devices and Integrated Optical Switch Matrix

Wavelength Tunable Cavity Mirror for Silicon Micro-Ring-Based Hybrid Integrated Lasers

Compact Silicon-Based Wavelength-Selective Photonic Integrated Devices and the Applications

Design of AWG Demultiplexer with TIR Mirrors Based on SOI Material

Fully Embedded Board-Level Optical Interconnects From Waveguide Fabrication to Device Integration

Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

Novel structure of passive ring waveguide resonator on silicon substrate

Fabrication of silicon-on-glass waveguides

Etched-Diffraction-Grating-Based Planar Waveguide Demultiplexer on Silicon-on-Insulator