Tunable Silicon Reflection Cavity Mirror Based on Microring Resonator

Li Xia,Wang Chao,Yu Hui,Jiang Xiaoqing
DOI: https://doi.org/10.3788/aos201636.1223002
2016-01-01
Acta Optica Sinica
Abstract:Considering the requirement of monochromaticity and tunability for resonator used in on-chip optical interconnect source,we design and make a tunable silicon reflection cavity mirror based on microring resonator,using complementary metal-oxide-semiconductor technology and silicon material on insulating substrate.The performance of the reflection cavity is analyzed by the transfer-matrix method,and we find that the reflection cavity shows good properties in sharpness and extinction ratio.The experimental results show that the reflectivity of the reflection cavity can reach 90% at the wavelength of 1549 nm,the quality factor is 3 × 104,and the free spectral range (FSR) is 9.6 nm.By applying the thermo-optic modulation to the microring resonator,the wavelength tunability in FSR can be realized within the power range of 0-40.5 mW.
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