Abstract:Efficient tunable photonic integrated devices are important for the realization of reconfigurable photonic systems. Thermal tuning is a convenient and effective approach, and silicon’s large heat conductivity, thermo-optical coefficient, and CMOS fabrication compatibility make it a good candidate material for tunable optical microcavities, which are versatile elements in low-cost, large-scale photonic integrated circuits. Metal heaters are traditionally used for tuning, and a thick SiO2 upper-cladding layer is usually needed to prevent light absorption by the metal since that could reduce response speed and heating efficiency. In this paper, we propose and experimentally demonstrate thermally tunable silicon photonic microdisk resonators by introducing transparent graphene nanoheaters, which contact the silicon core directly without any isolator layer. The theoretical and experimental results show that the transparent graphene nanoheaters improve the heating efficiency, the temporal response, and the achievable temperature in comparison with a traditional metal heater. Furthermore, the graphene nanoheater is convenient for use in ultrasmall nanophotonic integrated devices due to its single-atom thickness and excellent flexibility. Both experiments and simulations show that the transparent graphene nanoheater is a promising option for other thermally tunable photonic integrated devices such as optical filters and switches.

A Tunable Silicon Ring Reflector

Tunable Silicon Reflection Cavity Mirror Based on Microring Resonator

Silicon Reflectors for External Cavity Lasers Based on Ring Resonators

Wavelength Tunable Cavity Mirror for Silicon Micro-Ring-Based Hybrid Integrated Lasers

Thermally-Tuned Silicon Double Ring Resonator for External Cavity Tunable Laser

A Tunable Broadband Photonic RF Phase Shifter Based on a Silicon Microring Resonator

Optical Sensors Based on Cascaded Micro-Ring Resonators with Thermo-Optical Tuning

Optically Tuneable Microwave-Photonic Phase Shifter Based on Silicon Microring Resonator

Coupled-Ring Reflector in an External-Cavity Tunable Laser

Widely Tunable Semiconductor Laser Based on Double Half-Wave-Coupled Rectangular Ring Resonators

Highly Efficient Thermo-Optic Tunable Micro-Ring Resonator Based on an LNOI Platform.

Silicon micro-ring tunable laser for coherent optical communication.

C and L Bands Wavelength Tunable Laser with Silicon Photonic-wire Waveguide Micro-ring Resonators

Bandwidth and Wavelength Tunable Optical Filter Based on Silicon Multiple Microring Resonators

Channel-Selectable Optical Link Based on a Silicon Microring for On-Chip Interconnection

Athermal Silicon Ring Resonators Clad with Titanium Dioxide for 13µm Wavelength Operation

On-Chip Reflectivity-Tunable Single Wavelength Reflector

Athermal silicon ring resonators clad with titanium dioxide for 1.3 mu m wavelength operation

Thermally Tunable Silicon Photonic Microdisk Resonator with Transparent Graphene Nanoheaters

Tunable Coupled-Ring-Resonator of Thermally Actuated Optical Switch Array

Simulation, Fabrication and Characterization of a Tunable Bragg Reflector Based on Silicon Oxide and Silicon Nitride Dielectric Films Deposited by PECVD