Turning-Mirror-Integrated Arrayed-Waveguide Gratings on Silicon-on-Insulator

Weiwei Zheng,Kemiao Jia,Simiao Xiao,Fan Wang,Guangbo Li,Yubo Li,Xiaoqing Jiang,Minghua Wang,Jianyi Yang
DOI: https://doi.org/10.1109/group4.2006.1708175
2006-01-01
Abstract:Optical demultiplexers employing the turning-mirror-integrated arrayed-waveguide grating (AWG) are demonstrated on the silicon-on-insulator material. Description of the design and fabrication procedures is provided. The sizes of the devices are effectively reduced while the performance are comparable with that of the conventional AWG that was fabricated on the same wafer. The adjacent and nonadjacent crosstalks are better than -19 dB and -23 dB, respectively, and the typical on-chip channel loss less than 8.8 dB
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