SOI-based Arrayed Waveguide Grating Router with grating couplers fabricated in a single shallow etching step

Chen Yang,Jun Zou,Tingting Lang,Jian-Jun He

DOI: https://doi.org/10.1364/acpc.2015.asu2a.22

2015-01-01

Abstract:We experimentally demonstrate a 8×8 arrayed waveguide grating router (AWGR) based on silicon-on-insulator (SOI) platform. The minimum insertion loss and the crosstalk are 1.90 dB and -15 dB, respectively.

What problem does this paper attempt to address?

A 8×8 Arrayed Waveguide Grating Router Based on SOI Platform

Yue Wu,Ti-ng Ting Lang,Jinyan Song,Jian-Jun He

DOI: https://doi.org/10.1109/icocn.2017.8121403

2017-01-01

Abstract:We design and experimentally fabricate a 8×8 arrayed waveguide grating router(AWGR) with a channel spacing of400 GHz based on silicon-on-insulator (SOI) platform. The arrayed waveguide region of this device is horseshoe-shaped to realize a small footprint of 730 μm × 580 μm. Experimental results show good cyclic performance. The crosstalk and insertion loss are about -21 dB and 2.7 dB, respectively. This compact device can be used in optical interconnect systems.
Horseshoe-Shaped 16×16 Arrayed Waveguide Grating Router Based on SOI Platform

Yue Wu,Tingting Lang,Jian-Jun He

DOI: https://doi.org/10.1364/acpc.2017.s4j.3

2017-01-01

Abstract:We design and experimentally demonstrate a horseshoe-shaped 16 × 16 arrayed waveguide grating router with a channel spacing of 200 GHz based on SOI platform. The minimum insertion loss and the crosstalk are -3.5 dB and −16 dB, respectively.
A 8x8 Arrayed Waveguide Grating Router Based On Soi Platform

Yue Wu,Ti-ng Ting Lang,Jinyan Song,Jian-Jun

DOI: https://doi.org/10.1109/icocn.2017.8121403

2017-01-01

Abstract:We design and experimentally fabricate a 8x8 arrayed waveguide grating router (AWGR) with a channel spacing of 400 GHz based on silicon-on-insulator (SOI) platform. The arrayed waveguide region of this device is horseshoe-shaped to realize a small footprint of 730 mu m x580 mu m. Experimental results show good cyclic performance. The crosstalk and insertion loss are about -21 dB and 2.7 dB, respectively. This compact device can be used in optical interconnect systems.
SiON-Based Cyclic Arrayed Waveguide Grating Routers with Improved Loss Uniformity

Wang Shuxin,Lang Tingting,Song Guangyi,He Jianjun

DOI: https://doi.org/10.3788/aos201939.1123001

IF: 2.4

2018-01-01

Optics Communications

Abstract:We present silicon-on-insulator (SOI)-based cyclic arrayed waveguide grating routers (AWGRs) with improved channel loss uniformity in the full free spectral range (FSR) by using dual-tapered auxiliary waveguides between the ends of arrayed waveguides. The field distribution at the image plane of the output free propagation region (FPR) is adjusted by the auxiliary waveguides and a flat-top shape can be obtained by appropriate optimization. 8×8 and 15×15 AWGRs with optimized auxiliary waveguides, having a channel spacing of 3.2 nm and 1.6 nm, respectively, are fabricated and the measured loss non-uniformity is less than 0.5 dB, significantly improved by at least 1.5 dB compared with conventional AWGRs.
Compact 4×4 1250GHz silicon arrayed waveguide grating router for optical interconnects

guanting chen,jun zou,tingting lang,jianjun he

DOI: https://doi.org/10.1117/12.2078047

2015-01-01

Abstract:A compact silicon arrayed waveguide grating router (AWGR) for optical interconnects is experimentally demonstrated. The design, fabrication and characterization of this 4x4 AWGR with a 1250 GHz channel spacing and a 5 THz free spectral range are discussed. The loss of the AWGR varies from 2.5 dB to 5.5 dB and the crosstalk is better than -18 dB. The functionality of the AWG as a router and its good rotation property are also presented. This device has a compact footprint of 0.46x0.26mm(2).
8×8 Cyclic Arrayed Waveguide Grating Router Based on InP Platform in O-Band

Zhuping Fan,Jia Guo,Qi Chen,Jinsheng Ni,Jian-Jun He

2019-01-01

Abstract:An integrated InGaAlAs/InP-based 8×8 cyclic arrayed waveguide grating router with a channel spacing of 2.2 nm in telecom O-band is demonstrated. The device can be applied to large-scale monolithic integrated circuits for optical interconnects.
Ultra-Compact Silicon-Arrayed Waveguide Grating Routers For Optical Interconnect Systems

Guangyi Song,Jun Zou,Jianjun He

DOI: https://doi.org/10.3788/COL201715.030603

IF: 2.56

2017-01-01

Chinese Optics Letters

Abstract:We present compact silicon-arrayed waveguide grating routers (AWGRs) with three different channel spacings of 20, 6.4, and 3.2 nm for optical interconnect systems. The AWGR with the 20 nm channel spacing shows a low loss of 2.5 dB and a low crosstalk of - 20 dB and has a footprint of only 0.27 mm x 0.19 mm. The AWGR with the channel spacing of 6.4 nm has loss ranging from 3 to 8 dB, and the crosstalk is - 18 dB. As for the 3.2 nm channel spacing, the loss is about 4 dB, and the crosstalk is - 12 dB.
High Performance Demonstration of a 16 × 16 Silica-based Cyclic Arrayed-Waveguide Grating Router

Zhuping Fan,Jiasheng Zhao,Jian-Jun He

DOI: https://doi.org/10.1109/icocn53177.2021.9563766

2021-01-01

Abstract:An integrated 16 × 16 cyclic-arrayed waveguide grating router (AWGR) targeting C-band DWDM routing applications with a channel spacing of 100 GHz is designed and experimentally demonstrated. Measurement results show that the maximum channel deviation is around ±7% of its channel spacing with the 3-dB bandwidth wider than 0.4 nm for all port combinations, and the minimum insertion loss and the worst crosstalk are about 1.64 dB and 30 dB, respectively.
Mirror-Integrated Arrayed-Waveguide Grating On Silicon-On-Insulator

Km Jia,Wh Wang,Yz Tang,Yr Yang,Jy Yang,Xq Jiang,Ym Wu,Mh Wang,Yl Wang

DOI: https://doi.org/10.1117/12.576059

2005-01-01

Abstract:In this paper we design and fabricate the first mirror-integrated silicon-on-insulator-based (SOI-based) arrayed-waveguide grating (AWG) with working functions. The fabricated AWG has a channel spacing of 1.6 nm centered at 1556 nm. We substitute the bent waveguides array in the traditional AWG configuration by adopting the structure of the mirror-integrated straight waveguides. Theoretical advantages of the new structure are demonstrated. Detailed description of the design procedure and the fabrication process is provided. Test results of both the traditional AWG and this design are delineated and analyzed, which shows that the total length of the waveguide array is reduced from 3.14 cm to 2.53 cm, and the holistic structure also becomes more compact. The crosstalk of the fabricated 1x8 AWG is better than -20 dB. The typical on-chip insertion loss is about 10 dB. Losses caused by the mirrors and the waveguides transmission are about 4.2 dB, both of which resulted from the imprecision in the fabrication process.
Turning-Mirror-Integrated Arrayed-Waveguide Gratings on Silicon-on-Insulator

Weiwei Zheng,Kemiao Jia,Simiao Xiao,Fan Wang,Guangbo Li,Yubo Li,Xiaoqing Jiang,Minghua Wang,Jianyi Yang

DOI: https://doi.org/10.1109/group4.2006.1708175

2006-01-01

Abstract:Optical demultiplexers employing the turning-mirror-integrated arrayed-waveguide grating (AWG) are demonstrated on the silicon-on-insulator material. Description of the design and fabrication procedures is provided. The sizes of the devices are effectively reduced while the performance are comparable with that of the conventional AWG that was fabricated on the same wafer. The adjacent and nonadjacent crosstalks are better than -19 dB and -23 dB, respectively, and the typical on-chip channel loss less than 8.8 dB
Design and fabrication of 1 × 32 silica-based arrayed waveguide grating

WenHua Long,GuangBo Li,Kemiao Jia,Hongchang Qu,Yanzhe Tang,Yaming Wu,Jianyi Yang,Yuelin Wang-

2005-01-01

Abstract:A 1 × 32 silica-on-silicon-based arrayed waveguide grating is designed and fabricated. The detailed consideration of waveguide bending, coupling between adjacent waveguides, and the taper structure for the design of the arrayed waveguide grating is presented. By applying the high-resolution photomask, PECVD-based silica deposition, reactive ion etching, and 8° end-face polishing, a AWG chip is obtained with crosstalk lower than -28 dB for the adjacent channels and -35 dB for the non-adjacent channels. The average insertion loss is about 4.9 dB and the imbalance is approximately 1.72 dB after the chip is fiber-array coupled and packaged.
Uniform-loss Cyclic Arrayed Waveguide Grating Router Using a Mode-Field Converter Based on a Slab Coupler and Auxiliary Waveguides.

Yang Chen,ShuXin Wang,Tingting Lang,Jian-Jun He

DOI: https://doi.org/10.1364/ol.44.000211

IF: 3.6

2019-01-01

Optics Letters

Abstract:We designed and fabricated a silica-based 16 x 16 cyclic arrayed waveguide grating router (AWGR) with improved channel loss uniformity using a simple mode-field converter composed of a slab coupling region and auxiliary waveguides placed at the interface between the arrayed waveguides and the output star coupler of the AWGR. The mode-field converter transforms the fundamental Gaussian-shaped mode in the arrayed waveguides to a complex mode field which produces a flat-top far field at the image plane of the output star coupler. It does not change the overall construction of the AWGR and does not increase the device size. The experimental results show that loss non-uniformity for a 16 x 16 AWGR with 1.6 nm wavelength channel spacing is reduced from 3 to 0.5 dB after adapting the mode-field converter, and the crosstalk is improved by about 2 dB. (C) 2019 Optical Society of America
Compact Arrayed-Waveguide Grating on Silicon-On-Insulator with Integrated Waveguide Turning Mirrors

GB Li,Z Gong,KM Jia,WH Long,JY Yang,XQ Jiang,YL Wang,MH Wang

DOI: https://doi.org/10.1088/0256-307x/22/12/033

2005-01-01

Abstract:A compact arrayed-waveguide grating (AWG) on the silicon-on-insulator material is designed and fabricated with employment of waveguide-integrated turning mirrors (WITMs). By properly setting the incident angle with the value of 45 degrees, the effective area of the WITM AWG is only 1.15 cm x 1.15 cm with the arrayed waveguide area of 0.6 cm x 0.6 cm. The crosstalk of the fabricated 1 x 6 AWG is better than -19 dB. The on-chip insertion loss is about -8.8 dB and the output nonuniformity is less than 0.6 dB. The polarization-dependent central wavelength shift is about 0.048 nm and the polarization dependent loss is neglectable.
Performance improvement for silicon-based arrayed waveguide grating router.

Jun Zou,Zichun Le,Jinhua Hu,Jian-Jun He

DOI: https://doi.org/10.1364/OE.25.009963

IF: 3.8

2017-01-01

Optics Express

Abstract:We analyze the impact of aberration on spectral performance of silicon-based arrayed waveguide grating (AWG) router with the conventional design using a constant pitch along the grating circle for the array waveguides near the free propagation region (FPR), and simulation results show that due to existence of large aberration, side lobes occur in spectral responses of peripheral output channels for the center input light while more serious side lobes appear in most output channels within a free spectral range (FSR) for the edge channel input. Therefore, there is a high crosstalk in conventional N x N silicon AWG, which is very detrimental for router applications. In order to address it, a simple design with a constant projected period on a line tangent to the grating at its pole for the array waveguides near the FPR is proposed, and aberrations of all output wavelengths within a FSR are kept at a rather low level both for the center and edge input. Then we fabricate two kinds of AWG routers with the conventional and proposed design respectively on a SOI wafer, and experimental results show that spectral responses of the AWG router with the proposed design are significantly improved compared to those obtained in the conventional design, especially for the edge channel input. (C) 2017 Optical Society of America
A Novel Design Of Compact-Structure Arrayed-Waveguide Grating Device

By Li,Xq Jiang,Jy Yang,Mh Wang

DOI: https://doi.org/10.1117/12.444529

2001-01-01

Abstract:A novel type of compact-structure arrayed-waveguide grating (AWG) device is designed based on silicon-on-insulator (SOI) material. The size of the eight-channel AWG device is about 1.2x 1.2cm(2). In order to compensate TE-TM polarization, a total internal reflection (TIR) mirror is fabricated at the middle of each arrayed waveguide. When reflecting on this mirror, TE and TM modes have different phase changes. Through calculating the incidence angle, lightwaves of TE and TM modes which are at the same order can converge into the same output waveguide, thus the TE-TM shift is diminished. Due to this TIR mirror design, the total length of curved waveguides is reduced, while more straight waveguides are used. So the curved waveguide loss is reduced and the device size is diminished. The experimental results are given and feasibility of fabrication is tested.
Loss uniformity improvement for cyclic arrayed waveguide grating based on silicon nanowire waveguides

xiang xia,yang chen,jun zou,tingting lang,jianjun he

DOI: https://doi.org/10.1109/OGC.2015.7336857

2015-01-01

Abstract:A cyclic arrayed waveguide grating (AWG) router based on silicon nanowire waveguides with uniform channel insertion loss is designed and experimentally demonstrated. Different from conventional design, the directions of arrayed waveguides are no longer pointed to the central output waveguide, but are adjusted according to a distribution function. The experimental results show that the channel insertion loss non-uniformity is reduced from 2.7 dB to 1.1 dB. This uniform loss design does not change the overall construction of AWGs, and does not increase the device size.
Ultra-compact arrayed waveguide grating triplexer based on silicon-on-insulator platform

Jun Zou,Xianxin Jiang,Tingting Lang,Jianjun He

DOI: https://doi.org/10.1109/CLEOPR.2013.6600263

2013-01-01

Abstract:We have demonstrated an ultra-compact birefringence-compensated arrayed waveguide grating (AWG) triplexer based on silicon nanowire waveguide. The cross-order design is employed and the device has a small footprint of 0.18×0.12 mm2. The normalized losses for TM polarization for three channels are less than 4 dB with the crosstalk better than 18 dB. The polarization dependent wavelength shift (PDλ) is less than 2.5 nm for three channels operating at the wavelength range of 1490-1550 nm by using angled star couplers in combination with different diffraction orders for the two polarizations.
Realization of an 8×8 AWG Router Using Silicon Oxynitride Waveguides

Shuxin Wang

DOI: https://doi.org/10.1117/12.2505539

2018-01-01

Abstract:We experimentally demonstrate a 8×8, 200 GHz cyclic AWG router using silicon oxynitride waveguides. The relative refractive index difference between the core and cladding layers is 9.75%. The output spectral response when light of TM polarization is input from the central input channel shows the central channel loss, non-uniformity and crosstalk are -1.51 dB, 2.23 dB, and -19 dB, respectively. And when light is input from the edge input channel, the central channel loss, non-uniformity and crosstalk are -3.68 dB, 2.38 dB, and -19 dB, respectively. Crosstalks vary from -19 dB to -21 dB for all channels. The device is polarization sensitive and a polarization dependent wavelength shift occurs in the spectral response of each output channel. The central wavelengths from central input channel to central output channel for the TE and TM polarization are 1553.8 nm and 1550.2 nm.
Monolithically Integrated 8 × 8 Transmitter-Router Based on Tunable V-Cavity Laser Array and Cyclic Arrayed Waveguide Grating Router

Zhuping Fan,Jia Guo,Shuojian Zhang,Junqiang Zhu,Jianjun Meng,Qiaoli Li,Yayun Li,Jiasheng Zhao,Jian-Jun He

DOI: https://doi.org/10.1109/jphot.2022.3191946

IF: 2.4

2022-01-01

IEEE Photonics Journal

Abstract:A monolithic 8 × 8 transmitter-router chip fabricated on InGaAlAs-InP multi-quantum well wafer for distributed wavelength routing network in the O-band with a channel spacing of 400 GHz is experimentally demonstrated. A tunable V-cavity laser (VCL) array, a cyclic-arrayed waveguide grating router (AWGR) and a semiconductor amplifier (SOA) array are integrated using the quantum-well intermixing (QWI) technique for its fabrication simplicity and cost effectiveness. A 200 GHz-spaced compact-size VCL is demonstrated with a 27 nm tuning range and a side-mode suppression ratio (SMSR) around 40 dB using a single-electrode controlled tuning. The chip output power is 24.6 mW. Measurement results of the transmitter-router chip show that all 64 input-output combinations have cyclic response spectra. After passing through the SOA with 80 mA bias current, an output power of about 9.6 mW and optical signal-to-noise ratio (OSNR) up to 39 dB have been measured. The demonstrated transmitter-router chip is fabricated on the same quantum well structure without requiring multiple epitaxial growth and complex grating fabrication. The characteristics of multi-wavelength and multi-port transmissions enable the distributed optical routing networks with flexible bandwidth allocation, which can find wide application in datacenters and high-performance computers.
Design and Fabrication of 8×8 Silica-Based Arrayed Waveguide Grating

LI Guang-bo,LONG Wen-hua,JIA Ke-miao,TANG Yan-zhe,WU Ya-ming,YANG Jian-yi,WANG Yue-lin

2006-01-01

Abstract:An 8×8 silica-based arrayed waveguide grating(AWG) with the central wavelength of 1.55 μm and the channel spacing of 0.8 nm is designed and fabricated.The design,fabrication and test process are presented in details.According to the test results of the packaged chip,the 3 dB bandwidth of the device is 0.22 nm,the minimum and maximum channel loss are 4.01 dB and 6.32 dB,respectively,when the central input channel is used,while the corresponding values for the outermost input channel are 6.24 dB and 9.02 dB,respectively.The output wavelength shift is below 0.039 nm.The crosstalk of the device is better than -25 dB.And the PDL of the device is less than 0.3 dB.

SOI-based Arrayed Waveguide Grating Router with grating couplers fabricated in a single shallow etching step

A 8×8 Arrayed Waveguide Grating Router Based on SOI Platform

Horseshoe-Shaped 16×16 Arrayed Waveguide Grating Router Based on SOI Platform

A 8x8 Arrayed Waveguide Grating Router Based On Soi Platform

SiON-Based Cyclic Arrayed Waveguide Grating Routers with Improved Loss Uniformity

Compact 4×4 1250GHz silicon arrayed waveguide grating router for optical interconnects

8×8 Cyclic Arrayed Waveguide Grating Router Based on InP Platform in O-Band

Ultra-Compact Silicon-Arrayed Waveguide Grating Routers For Optical Interconnect Systems

High Performance Demonstration of a 16 × 16 Silica-based Cyclic Arrayed-Waveguide Grating Router

Mirror-Integrated Arrayed-Waveguide Grating On Silicon-On-Insulator

Turning-Mirror-Integrated Arrayed-Waveguide Gratings on Silicon-on-Insulator

Design and fabrication of 1 × 32 silica-based arrayed waveguide grating

Uniform-loss Cyclic Arrayed Waveguide Grating Router Using a Mode-Field Converter Based on a Slab Coupler and Auxiliary Waveguides.

Compact Arrayed-Waveguide Grating on Silicon-On-Insulator with Integrated Waveguide Turning Mirrors

Performance improvement for silicon-based arrayed waveguide grating router.

A Novel Design Of Compact-Structure Arrayed-Waveguide Grating Device

Loss uniformity improvement for cyclic arrayed waveguide grating based on silicon nanowire waveguides

Ultra-compact arrayed waveguide grating triplexer based on silicon-on-insulator platform

Realization of an 8×8 AWG Router Using Silicon Oxynitride Waveguides

Monolithically Integrated 8 × 8 Transmitter-Router Based on Tunable V-Cavity Laser Array and Cyclic Arrayed Waveguide Grating Router

Design and Fabrication of 8×8 Silica-Based Arrayed Waveguide Grating