Fabrication Techniques of Ion-Exchanged-glass-based Waveguides and Related Integrated Optics Components

王明华,郝寅雷,李锡华,周强,江晓清,杨建义
DOI: https://doi.org/10.3969/j.issn.1007-2276.2006.z5.020
2006-01-01
Infrared and Laser Engineering
Abstract:In this paper,the technology of the ion-exchanged-glass-based integrated optics is studied with the purpose to establishing a platform to fabricate integrated optics components.After the ion-exchange techniques are investigated deeply,including the electric-field-assisted ion-exchange technique,the electric-field-assisted annealing, masking technique with the ion K~+,the buried waveguide with low propagation loss and low polarization-dependent loss is achieved successfully.With the optimization of the structure and configuration of Y-branch-based optical splitters,1×4,1×8,1×16,and 1×32 optical splitters are fabricated successfully.The main performance of these optical splitters reaches that of the products available in the international markets.Meanwhile,some new optical components are also studied.
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