Abstract:Optical waveguides fabricated in single crystals offer crucial passive/active optical components for photonic integrated circuits. Single crystals possess inherent advantages over their amorphous counterpart, such as lower optical losses in visible‐to‐mid‐infrared band, larger peak emission cross‐section, higher doping concentration. However, the writing of Type‐I positive refractive index modified waveguides in single crystals using femtosecond laser technology presents significant challenges. Herein, we introduce a novel femtosecond laser direct writing technique that combines slit‐shaping with an immersion oil objective to fabricate low‐loss Type‐I waveguides in single crystals. This approach allows for precise control of waveguide shape, size, mode‐field and refractive index distribution, with a spatial resolution as high as 700 nm and a high positive refractive index variation on the order of 10−2, introducing new degrees of freedom to design and fabricate passive/active optical waveguide devices. As a proof‐of‐concept, we successfully produced a 7 mm‐long circular‐shaped gain waveguide (∼10 μm in diameter) in an Er3+‐doped YAG single crystal, exhibiting a propagation loss as low as 0.23 dB/cm, a net gain of ∼3 dB and a polarization‐insensitive character. The newly‐developed technique is theoretically applicable to arbitrary single crystals, holding promising potential for various applications in integrated optics, optical communication, and photonic quantum circuits. This article is protected by copyright. All rights reserved

Fabricating Low Loss Waveguides over a Large Depth in Glass by Temperature Gradient Assisted Femtosecond Laser Writing.

Optical loss measurements in femtosecond laser written waveguides in glass

Glass Nanofibers for Micro- and Nano-Scale Photonic Devices

Effectively Writing Low Propagation and Bend Loss Waveguides in the Silica Glass by Using a Femtosecond Laser.

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Mode-tunable Low-Loss Waveguides in Glass for Visible Light Photonic Integrated Devices

Low-loss optofluidic waveguides in fused silica enabled by spatially shaped femtosecond laser assisted etching combined with carbon dioxide laser irradiation

Manufacturing of double-layered multimode optical waveguides in glass substrate

3D Laser Writing of Low‐Loss Cross‐Section‐Variable Type‐I Optical Waveguide Passive/Active Integrated Devices in Single Crystals

Transverse writing of three-dimensional tubular optical waveguides in glass with slit-shaped femtosecond laser beams

Transverse writing of three-dimensional tubular optical waveguides in glass with a slit-shaped femtosecond laser beam

Low-loss Photonic Device in Ge-Sb-S Chalcogenide Glass.

Photonic Circuits Written by Femtosecond Laser in Glass: Improved Fabrication and Recent Progress in Photonic Devices

Optical Waveguide Writing Inside Foturan Glass with Femtosecond Laser Pulses

Femtosecond laser writing low-loss waveguides in silica glass: highly symmetrical mode field and mechanism of refractive index change

Integrated multimode optical waveguides in glass using laser induced deep etching

Fabrication of polarization-independent waveguides deeply buried in crystal using aberration-corrected femtosecond laser direct writing

Fabrication of glass-based multimode optical power splitters

Fabrication of Polarization-Independent Waveguides Deeply Buried in Lithium Niobate Crystal Using Aberration-Corrected Femtosecond Laser Direct Writing

High-order mode waveguide amplifier with high mode extinction ratio written in an Er3+-doped phosphate glass

Low-loss fs-laser-written surface waveguide lasers at >2 µm in monoclinic Tm3+:MgWO4