Low-loss optofluidic waveguides in fused silica enabled by spatially shaped femtosecond laser assisted etching combined with carbon dioxide laser irradiation

Jianping Yu,Jian Xu,Qiaonan Dong,Jia Qi,Jianfang Chen,Aodong Zhang,Yunpeng Song,Wei Chen,Ya Cheng
DOI: https://doi.org/10.1016/j.optlastec.2022.108889
2022-11-14
Abstract:We demonstrate the fabrication of low-loss optofluidic waveguides encapsulated in fused silica glass using femtosecond laser microfabrication followed by carbon dioxide laser irradiation. Spatially-shaped femtosecond laser-assisted chemical etching is first used to fabricate microchannels with circular cross-sections and a string of open extra-access ports in the glass. Further, the carbon dioxide laser direct writing on the glass surface is used to create a thermal reflow effect of etched glass microstructures for simultaneously polishing all internal surfaces of channels and sealing the extra-access ports. With this effect, the inner surface roughness of the etched microchannels can be reduced to ∼ 40 nm. Finally, a single-mode microfluidic optical waveguide with a propagation loss of ∼ 0.78 dB/cm at 1310 nm is obtained inside the glass by filling a mixture solution of decane and liquid paraffin into a laser-polished microchannel.
optics,physics, applied
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